The characterization of surface topographic features on a component is typically quantified
using two-dimensional roughness descriptors which are captured by off-line desktop …

Common methods of in-process surface roughness measurement are capable of providing a
limited number of amplitude parameters for roughness assessment. This is mainly due to the …

This paper presents a disparity pattern-based autostereoscopic (DPA) 3D metrology system
that makes use of a microlens array to capture raw 3D information of the measured surface …

To meet the need of on-machine metrology in optical manufacturing, a compact and
snapshot dual-mode interferometric system is proposed for surface shape and roughness …

Traditional off-line measuring systems find it difficult to measure micro-structured workpieces
which have a large volume and heavy weight, such as micro-structured patterned precision …

Machining is extensively used for producing functional parts in various industries such as
aerospace, automotive, energy, etc. There is a growing demand for improved part quality …

One specific kind of electrically tunable lenses is utilizing curvature change via adjusting
input currents which electromagnetically exerts pressure on liquid volume to achieve …

鉴于数字全息表面粗糙度测量是对被记录的数字全息图进行数值重建获得相应的相位值,
将其映射为表面轮廓值后来计算表面粗糙度参数的, 分别以标准分辨率板和高度标定板为检测 …

In this work, we report on the fabrication and characterization of a miniature GaN chip with a
size of mm 3 for surface roughness measurement. Unlike conventional optical metrology that …

We present a novel method capable of measuring surface roughness of deposited thin films.
The method was tested with 4 sets of SiN thin films deposited using a plasma-enhanced …