A grating interferometer, called the “optical encoder,” is a commonly used tool for precise
displacement measurements. In contrast to a laser interferometer, a grating interferometer is …

Optical position encoders have been invented and investigated for several decades for
precision measurement. In this article, a comprehensive survey on the optical position …

精密测量是精密机械加工的基础, 是制造行业中影响制造精度的决定性因素之一,
在当代精密机械制造领域应用广泛. 基于光栅的精密位移测量系统以其对环境要求小 …

A novel grating interferometer configuration with eightfold optical subdivision to achieve
ultrahigh resolution using a special symmetrical prism is proposed. The optical subdivision …

Based on Talbot effect of optical microgratings, we report an ultra-compact sensor for
displacement and vibration measurement with resolution down to sub-nanometer level. With …

We present a novel multi-dimensional positional encoder approach that uses range-
resolved interferometry (RRI) to simultaneously interrogate multiple interferometers differing …

When a code disk of a displacement sensor is exposed to dust or other impurities, it causes
distortion of the grating moiré fringe signal, and thereby provides wrong displacement …

In this paper, to separate and compensate the nonlinear error in the grating interferometer,
we analyze the source and generation mechanism of this error, deduce the nonlinear error …

Interferential optical encoders are promising nano-positioning sensors in precision
manufacturing and metrology instrumentation. As measuring standard, the quality of …

Sinusoidal encoders and resolvers encode position information by providing a pair of sine
and the cosine signals. In order to determine the position information, suitable phase …