Absorption of an electron by a dielectric wall
FX Bronold, H Fehske - Physical review letters, 2015 - APS
We introduce a method for calculating the probability with which a low-energy electron
hitting the wall of a bounded plasma gets stuck in it and apply the method to a dielectric wall …
hitting the wall of a bounded plasma gets stuck in it and apply the method to a dielectric wall …
New achievement of the global sheath-bulk model for the collisionless radio-frequency using in scale industries
Plasma processing is extensively utilized in enormous industries products like
semiconductor devices, textile fabrics, modifying polymers, and seed treatments. One of the …
semiconductor devices, textile fabrics, modifying polymers, and seed treatments. One of the …
A simple model for ion flux‐energy distribution functions in capacitively coupled radio‐frequency plasmas driven by arbitrary voltage waveforms
The ion flux‐energy distribution function (IFEDF) is of crucial importance for surface
processing applications of capacitively coupled radio‐frequency (CCRF) plasmas. Here, we …
processing applications of capacitively coupled radio‐frequency (CCRF) plasmas. Here, we …
Microscopic theory of electron absorption by plasma-facing surfaces
FX Bronold, H Fehske - Plasma Physics and Controlled Fusion, 2016 - iopscience.iop.org
We describe a method for calculating the probability with which the wall of a plasma absorbs
an electron at low energy. The method, based on an invariant embedding principle …
an electron at low energy. The method, based on an invariant embedding principle …
Ion transit effects on sheath dynamics in the intermediate radio-frequency regime: excitations of ion-acoustic waves and solitons
M Shihab, A Elbadawy, NM El-Siragy… - … Sources Science and …, 2022 - iopscience.iop.org
Capacitively coupled plasma is investigated kinetically utilizing the particle-in-cell technique.
The argon (Ar) plasma is generated via two radio frequencies. The plasma bulk density …
The argon (Ar) plasma is generated via two radio frequencies. The plasma bulk density …
Electron kinetics at the plasma interface
FX Bronold, H Fehske, M Pamperin… - The European Physical …, 2018 - Springer
The most fundamental response of an ionized gas to a macroscopic object is the formation
of the plasma sheath. It is an electron depleted space charge region, adjacent to the object …
of the plasma sheath. It is an electron depleted space charge region, adjacent to the object …
The effect of the electron κ-distribution on the dust particle charging in the radio-frequency thermal-sheaths
M Shihab, IS Elkamash - Physica Scripta, 2024 - iopscience.iop.org
In order to investigate collisionless radiofrequency plasma sheaths containing dust particles,
three models are utilized: the novel kinetic scheme Ensemble-in-Spacetime (EST) model for …
three models are utilized: the novel kinetic scheme Ensemble-in-Spacetime (EST) model for …
[HTML][HTML] Non-linear lumped model circuit of capacitively coupled plasmas at the intermediate radio-frequencies
M Shihab - Physics Letters A, 2018 - Elsevier
The discharge dynamics in geometrically asymmetric capacitively coupled plasmas are
investigated via a lumped model circuit. A realistic reactor configuration is assumed. A single …
investigated via a lumped model circuit. A realistic reactor configuration is assumed. A single …
Kinetic investigation of the ion angular distribution in capacitive radio-frequency plasmas
M Shihab, T Mussenbrock - Physics of Plasmas, 2017 - pubs.aip.org
One of the key parameters in the context of plasma assisted processing in semiconductor
fabrication using capacitive radio-frequency plasmas is the ion flux distribution at the …
fabrication using capacitive radio-frequency plasmas is the ion flux distribution at the …
Bridging Child–Langmuir and Warren: exact and approximate solutions for the unipolar sheath of intermediate pressure
S Naggary, D Engel, L Kroll… - … Sources Science and …, 2019 - iopscience.iop.org
The stationary unipolar ion sheath is investigated in the regime of intermediate gas
pressure. A mathematical model is consulted which describes the motion of a single species …
pressure. A mathematical model is consulted which describes the motion of a single species …