Purpose Pressure, being one of the key variables investigated in scientific and engineering
research, requires critical and accurate measurement techniques. With the advancements in …

The miniaturization of microelectromechanical systems (MEMS) physical sensors is driven
by global connectivity needs and is closely linked to emerging digital technologies and the …

Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …

A novel amperometric immunosensor for the detection of α-fetoprotein (AFP) based on the
integration of microelectronic technology, mixed self-assembled monolayers (mixed SAMs) …

In the current times, microelectromechanical systems and nanoelectromechanical systems
form a major interdisciplinary area of research involving science, engineering, and …

A flexible technology for microfluidic applications using piezoelectric polyvinylidene fluoride
(PVDF) and polydimethylsiloxane (PDMS) was developed. The flexible piezoelectric PVDF …

An SOI CMOS multi-sensor MEMS chip, which can simultaneously measure temperature,
pressure and flow rate, has been reported. The multi-sensor chip has been designed …

This paper presents the details of a study on the measurement of oxygen flow by differential
pressure method in a clinical ventilator system. The simulation results obtained from the …

This paper presents design and characterization of a novel thermal-calorimetric flow-meter
using suspended-cantilever-structure. There is an air gap between the heater and each …

This study develops a MEMS-based low-cost sensing platform for sensing gas flow rate and
flow direction comprising four silicon nitride cantilever beams arranged in a cross-form …