A review and analysis of automatic optical inspection and quality monitoring methods in electronics industry
M Abd Al Rahman, A Mousavi - Ieee Access, 2020 - ieeexplore.ieee.org
Electronics industry is one of the fastest evolving, innovative, and most competitive
industries. In order to meet the high consumption demands on electronics components …
industries. In order to meet the high consumption demands on electronics components …
Optical wafer defect inspection at the 10 nm technology node and beyond
The growing demand for electronic devices, smart devices, and the Internet of Things
constitutes the primary driving force for marching down the path of decreased critical …
constitutes the primary driving force for marching down the path of decreased critical …
[PDF][PDF] 集成电路制造在线光学测量检测技术: 现状, 挑战与发展趋势
陈修国， 王才， 杨天娟， 刘佳敏， 罗成峰… - Laser & Optoelectronics …, 2022 - researching.cn
摘要在线测量检测技术与装备是保证集成电路(IC) 制造质量和良率的唯一有效技术手段, 在IC
制造过程中必须对IC 纳米结构的关键尺寸, 套刻误差, 以及缺陷等进行快速, 非破坏 …
制造过程中必须对IC 纳米结构的关键尺寸, 套刻误差, 以及缺陷等进行快速, 非破坏 …
Quasi-visualizable detection of deep sub-wavelength defects in patterned wafers by breaking the optical form birefringence
In integrated circuit (IC) manufacturing, fast, nondestructive, and precise detection of defects
in patterned wafers, realized by bright-field microscopy, is one of the critical factors for …
in patterned wafers, realized by bright-field microscopy, is one of the critical factors for …
A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets
The detection of defects using inspection systems is common in a wide range of
corporations such as semiconductor industries. The use of techniques based on deep …
corporations such as semiconductor industries. The use of techniques based on deep …
A multiscale attention mechanism super-resolution confocal microscopy for wafer defect detection
X Sun, B Zhang, Y Wang, J Mai, Y Wang… - IEEE Transactions …, 2024 - ieeexplore.ieee.org
Confocal microscopy is an essential component of wafer defect detection systems. Wafers
are raw materials used in the manufacture of semiconductor chips. The semiconductor chip …
are raw materials used in the manufacture of semiconductor chips. The semiconductor chip …
Machine learning techniques applied for the detection of nanoparticles on surfaces using coherent Fourier scatterometry
D Kolenov, SF Pereira - Optics Express, 2020 - opg.optica.org
We present an efficient machine learning framework for detection and classification of
nanoparticles on surfaces that are detected in the far-field with coherent Fourier …
nanoparticles on surfaces that are detected in the far-field with coherent Fourier …
[HTML][HTML] Retrieving positions of closely packed subwavelength nanoparticles from their diffraction patterns
Distinguishing two objects or point sources located closer than the Rayleigh distance is
impossible in conventional microscopy. Understandably, the task becomes increasingly …
impossible in conventional microscopy. Understandably, the task becomes increasingly …
Relationship between the kernel size of a convolutional layer and the optical point spread function in ghost imaging using deep learning for identifying defect locations
S Kataoka, Y Mizutani, T Uenohara, Y Takaya… - Applied Optics, 2022 - opg.optica.org
We explore the contribution of convolutional neural networks to correcting for the effect of the
point spread function (PSF) of the optics when applying ghost imaging (GI) combined with …
point spread function (PSF) of the optics when applying ghost imaging (GI) combined with …
Noise-robust deep learning ghost imaging using a non-overlapping pattern for defect position mapping
S Kataoka, Y Mizutani, T Uenohara, Y Takaya… - Applied Optics, 2022 - opg.optica.org
Defect detection requires highly sensitive and robust inspection methods. This study shows
that non-overlapping illumination patterns can improve the noise robustness of deep …
that non-overlapping illumination patterns can improve the noise robustness of deep …