(57) ABSTRACT A cell circuit and corresponding layout is disclosed to include linear-
shaped diffusion fins defined to extend over a Substrate in a first direction so as to extend …

H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state
components formed in or on a common substrate including semiconductor components …

5,923,059 A 7/1999 Gheewala................... 257/204 of the substrate. The semiconductor
device includes a number of linear gate electrode tracks de? ned to extend over the …

H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state
components formed in or on a common substrate including semiconductor components …

H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state
components formed in or on a common substrate including semiconductor components …

First and second virtual grates are defined as respective sets of parallel virtual lines
extending across a layout area in first and second perpendicular directions, respectively …

H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state
components formed in or on a common substrate including semiconductor components …

In this paper, a method for improving the process window is described by simultaneous
source mask optimization (SMO). The method optimizes the source and mask of a critical …

5497334 A 3/1996 Russell “. 31 6,633,182 B2 10/2003 Pileggi et a1. 5,497,337 A 3/1996
Ponnapalh et a1. 6 643 831 B2 110003 Chang et a1 '5,581,098 A 12/1996 Chang …

H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state
components formed in or on a common substrate including semiconductor components …