High-speed atomic force microscopy in ultra-precision surface machining and measurement: challenges, solutions and opportunities

C Yang, CQ Dang, WL Zhu, BF Ju - Surface Science and Technology, 2023 - Springer
The atomic force microscope (AFM) possesses a unique capability for three-dimensional,
high-resolution imaging down to the atomic level. It operates without the needs of additional …

Electric-field-assisted contact mode atomic force microscope-based nanolithography with low stiffness conductive probes

H Zhou, Y Jiang… - Journal of Micro …, 2022 - asmedigitalcollection.asme.org
Electric-field-assisted atomic force microscope (E-AFM) nanolithography is a novel polymer-
patterning technique that has diverse applications. E-AFM uses a biased atomic force …

Characterizing vibration-assisted atomic force microscopy (AFM)-based nanomachining via perception of acoustic emission phenomena using a sensor-based real …

Q Ma, H Zhou, J Deng, Z Wang - Manufacturing Letters, 2022 - Elsevier
The emerging atomic force microscope (AFM)-based nanolithography offers promising
opportunities for nanopatterning applications. However, critical issues reside in the …

A sensor-based monitoring approach to predict surface profile of vibration-assisted atomic force microscopy (AFM)-based nanofabrication

X Wang, H Zhou, J Deng, Z Wang - Manufacturing Letters, 2023 - Elsevier
The vibration-assisted atomic force microscope (AFM)-based nanomachining offers a
promising opportunity for low-cost nanofabrication with high tunability. However, critical …

Research on AFM tip-related nanofabrication of two-dimensional materials

M Li, K Xun, X Zhu, D Liu, X Liu, X Jin… - Nanotechnology …, 2023 - degruyter.com
With the great success of graphene, two-dimensional (2D) materials, thanks to their
fascinating electronic and optoelectronic properties, have aroused extensive attention …

A sensor-based analytic approach for predictions of nanomachined surface profile variations via capturing temporal-spectral Acoustic Emission (AE) features for …

Z Wang, X Wang, H Zhou… - Surface Engineering and …, 2023 - spiedigitallibrary.org
The atomic force microscope (AFM)-based nanomachining has the potential for highly
customized nanofabrication due to its low cost and tunability. However, the low productivity …

Advanced Explainable Machine Learning (XML) Approaches and Their Applications in Manufacturing Processes

Q Ma - 2024 - search.proquest.com
Manufacturing is at the forefront of technological advances, and machine learning
techniques offer unprecedented opportunities for process optimization, quality improvement …

Electric-Field and Mechanical Vibration-Assisted Atomic Force Microscope-Based Nanopatterning

H Zhou, Y Jiang, C Ke, J Deng - Journal of Micro …, 2022 - asmedigitalcollection.asme.org
Atomic force microscope (AFM)-based nanolithography is a cost-effective nanopatterning
technique that can fabricate nanostructures with arbitrary shapes. However, existing AFM …

Ultrafast Nanoscale Patterning System: Surfing Scanning Probe Lithography

B Yao - 2022 - search.proquest.com
The development of the semiconductor industry is encountering a giant leap recently as
Moorse's is extended to the next levels. Advanced nanomanufacturing technology is the …

Multiple-Energy-Assisted AFM-Based Nanopatterning

H Zhou - 2022 - search.proquest.com
Atomic force microscope (AFM)-based nanolithography is a cost-effective nanopatterning
technique that can fabricate nanostructures with arbitrary shapes. However, the existing …