[HTML][HTML] Technique of High-Field Electron Injection for Wafer-Level Testing of Gate Dielectrics of MIS Devices
DV Andreev, VV Andreev, M Konuhova, AI Popov - Technologies, 2024 - mdpi.com
We propose a technique for the wafer-level testing of the gate dielectrics of metal–insulator–
semiconductor (MIS) devices by the high-field injection of electrons into the dielectric using a …
semiconductor (MIS) devices by the high-field injection of electrons into the dielectric using a …