Microhotplates for metal oxide semiconductor gas sensor applications—Towards the CMOS-MEMS monolithic approach
The recent development of the Internet of Things (IoT) in healthcare and indoor air quality
monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based …
monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based …
Pd/Ag alloy as an application for hydrogen sensing
B Sharma, JS Kim - International Journal of Hydrogen Energy, 2017 - Elsevier
A highly sensitive H 2 gas sensor was fabricated using a Micro Electromechanical Systems
(MEMS) procedure having an embedded micro-heater. The palladium-silver (Pd/Ag having …
(MEMS) procedure having an embedded micro-heater. The palladium-silver (Pd/Ag having …
Ultra-low power MEMS micro-heater device
M Mahdi - Microsystem Technologies, 2021 - Springer
In this paper, we propose a simple design for the heating device with ultra-low power
consumption. The device is composed of a micro heater made of Nichrome (20/80) alloy …
consumption. The device is composed of a micro heater made of Nichrome (20/80) alloy …
[HTML][HTML] A micro-thin-film getter–heater unit for high vacuum capsulation of MEMS devices
Y Ji, L Feng, S Guo, X Peng, S Chen, W Li, S Wang - AIP Advances, 2022 - pubs.aip.org
In this paper, we proposed a micro-getter unit with a square thin-film getter formed atop a
thin-film heater for vacuum packaging of a Micro-Electro-Mechanical System (MEMS) …
thin-film heater for vacuum packaging of a Micro-Electro-Mechanical System (MEMS) …
Fabrication and characterizations of microelectromechanical systems (MEMS) thermal conductivity gas sensor
HQ Zhang, B Shen, XL Liu - Journal of Nanoelectronics and …, 2018 - ingentaconnect.com
Aiming at solving the problems of large resistance dispersion and difficult compensator
matching of beadtype thermal conductivity gas sensors, a microelectromechanical systems …
matching of beadtype thermal conductivity gas sensors, a microelectromechanical systems …