Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Microelectromechanical systems (MEMS) resonators have allowed the development of
magnetic field sensors with potential applications such as biomedicine, automotive industry …

In recent years, there has been an increasing interest in hand movements in various
application fields. However, the human hand is too dexterous and only has limited space …

This paper reports the developments toward an integrated, tri-axial, frequency-modulated,
consumergrade, and microelectromechanical system (MEMS) gyroscope. A custom low …

In this paper, a complete system of a frequency-modulated gyroscope with digital output for
future low-power, high-stability, and wide full-scale applications is presented. The system …

A Lorentz force based resonant MEMS magnetic-field sensor with optical readout has been
demonstrated. The sensor employs a micromachined resonant mirror that is excited by the …

Abstract Microsystems (or Micro Electro Mechanical Systems, MEMS) are important
components of many popular products in the consumer market and are one of the enabling …

This paper discusses the constraints in the design of circuits for microelectromechanical
systems (MEMS) resonant sensors in consumer applications, presents a novel integrated …

We propose a simplified, fast, and operative simulation tool for the prediction of gas damping
occurring in the microelectromechanical systems (MEMS) of arbitrarily complex geometry …

In this paper, a Lorentz force magnetometer demonstrates quadrature frequency modulation
operation. The Lorentz force magnetometer consists of a conventional 3-port resonator …