This work analyzes a built-in slider detection method for a charge-induction type electrostatic
film actuator with a high surface-resistance slider. In the detection method, one stator …

Based on the performance requirements of safety and arming devices in a micro-electro-
mechanical fuse system, a type of pyrotechnical sliding micro-actuators were independently …

This paper introduces a new actuation scheme for implementing Pulsed Digital Oscillators
(PDOs) for electrostatic MEMS resonators. In this scheme, the capacitance of the device is …

This paper describes a method to extend the range of motion of a deformable, continuous
membrane mirror beyond the limit of open-loop electrostatic instability through feedback …

We present the design of a novel driver for a comb drive actuator. This actuator is required to
have both a large displacement of 200 μ m and a high resolution of 50 nm. Traditionally …

A hypothetical new digital-design paradigm called field programmable robot arrays (FPRAs)
has been introduced in which raises a number problems that need to be solved for …

This paper investigates the response of microcantilever and microbridge actuators, under
alternating current (AC) and direct current (DC) excitations. The analysis is carried out by …

A method for controlling position, damping and inertia in parallel-plate electrostatic actuators
is proposed. This method overcomes the pull-in effect and the limitations produced by the …

6,674,383 B2 1/2004 Horsley et al. 2007/O133976 A1 6/2007 Gutierrez 6,675,671 B1
1/2004 Jokiel et al. 2007/0284964 A1* 12/2007 Chung et al................... 310,309 6,847,907 …

4496, 217 A 1/1985 Aoyagi formed thereupon. The silicon MEMS device can be config
4,716.432 A 12/1987 Stephany ured to be mounted to a circuitboard via the solder contact …