The majority of microelectromechanical system (MEMS) devices must be combined with
integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers …

Quality factor (Q) is an important property of micro-and nano-electromechanical (MEM/NEM)
resonators that underlie timing references, frequency sources, atomic force microscopes …

Piezoresistive sensors are among the earliest micromachined silicon devices. The need for
smaller, less expensive, higher performance sensors helped drive early micromachining …

Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Most commercially available cochlear implants and hearing aids use microphones as
sensors for capturing the external sound field. These microphones are in general located in …

A micromachined accelerometer device structure with diffraction-based optical detection and
integrated electrostatic actuation is introduced. The sensor consists of a bulk silicon proof …

High-precision microelectromechanical inertial sensors based on spring-mass structures are
of great interests for a wide range of applications, including inertial navigation, disaster …

The thermomechanical motion imposes the fundamental noise limit in room-temperature
resonant sensors and oscillators. Due to the inherently low sensitivity of capacitive …

Abstract System development and characterization of a low noise low offset SOI MEMS–
CMOS PCB-integrated multi-chip±4g piezoresistive accelerometer sensor comprising a …

This work investigates a new concept of an electrostatically actuated resonant switch
(EARS) for earthquake detection and low-g seismic applications. The resonator is designed …