A critical literature review of focused electron beam induced deposition
WF Van Dorp, CW Hagen - Journal of Applied Physics, 2008 - pubs.aip.org
An extensive review is given of the results from literature on electron beam induced
deposition. Electron beam induced deposition is a complex process, where many and often …
deposition. Electron beam induced deposition is a complex process, where many and often …
Precursors for direct-write nanofabrication with electrons
Focused electron beam-induced deposition (FEBID) is a maskless, direct-write
nanolithography approach for the growth of nanostructures. In recent years, significant …
nanolithography approach for the growth of nanostructures. In recent years, significant …
Gas-assisted focused electron beam and ion beam processing and fabrication
I Utke, P Hoffmann, J Melngailis - … of Vacuum Science & Technology B …, 2008 - pubs.aip.org
Beams of electrons and ions are now fairly routinely focused to dimensions in the nanometer
range. Since the beams can be used to locally alter material at the point where they are …
range. Since the beams can be used to locally alter material at the point where they are …
Focused, nanoscale electron-beam-induced deposition and etching
Focused electron-beam-induced (FEB-induced) deposition and etching are versatile, direct-
write nanofabrication schemes that allow for selective deposition or removal of a variety of …
write nanofabrication schemes that allow for selective deposition or removal of a variety of …
Creating pure nanostructures from electron-beam-induced deposition using purification techniques: a technology perspective
A Botman, JJL Mulders, CW Hagen - Nanotechnology, 2009 - iopscience.iop.org
The creation of functional nanostructures by electron-beam-induced deposition (EBID) is
becoming more widespread. The benefits of the technology include fast'point-and …
becoming more widespread. The benefits of the technology include fast'point-and …
3D nanoprinting via focused electron beams
Additive manufacturing of three-dimensional objects on the nanoscale is a very relevant
topic but still a highly challenging task. Among the pool of nanofabrication techniques …
topic but still a highly challenging task. Among the pool of nanofabrication techniques …
Purification of platinum and gold structures after electron-beam-induced deposition
A Botman, JJL Mulders, R Weemaes… - Nanotechnology, 2006 - iopscience.iop.org
The technique of electron-beam-induced deposition (EBID), when performed with organic
precursors, typically results in relatively low metal content due to the partial decomposition of …
precursors, typically results in relatively low metal content due to the partial decomposition of …
Electron beam induced deposition at elevated temperatures: compositional changes and purity improvement
JJL Mulders, LM Belova, A Riazanova - Nanotechnology, 2010 - iopscience.iop.org
Thermally assisted electron beam induced deposition can result in an improvement of the
purity of nano-scale depositions. Six commonly used organic precursors were examined: W …
purity of nano-scale depositions. Six commonly used organic precursors were examined: W …
Tuning the electrical conductivity of Pt-containing granular metals by postgrowth electron irradiation
F Porrati, R Sachser, CH Schwalb… - Journal of Applied …, 2011 - pubs.aip.org
We fabricated Pt-containing granular metals by focused electron beam–induced deposition
from the (CH 3) 3 CH 3 C 5 H 4 Pt precursor gas. The granular metals are made of platinum …
from the (CH 3) 3 CH 3 C 5 H 4 Pt precursor gas. The granular metals are made of platinum …
Impact of electron-beam heating during 3D nanoprinting
An artifact limiting the reproduction of three-dimensional (3D) designs using nanoprinting
has been quantified. Beam-induced heating was determined through complementary …
has been quantified. Beam-induced heating was determined through complementary …