The detailed science and technology of crystalline oxide film growth using vacuum methods
is reviewed and discussed with an eye toward gaining fundamental insights into the …

SrTiO 3 epitaxial growth by molecular beam epitaxy (MBE) on silicon has opened up the
route to the monolithic integration of various complex oxides on the complementary metal …

The fundamental challenge for designing transparent conductors used in photovoltaics,
displays and solid-state lighting is the ideal combination of high optical transparency and …

This perspective considers the enormous promise of epitaxial functional transition metal
oxide thin films for future applications in low power electronic and energy applications since …

Due to the limitations in conventional complementary metal–oxide–semiconductor (CMOS)
scaling technology in recent years, innovation in transistor structures and integration of …

The molecular beam epitaxy of SrTiO 3 (STO) layers on Si (001) is studied, focusing on the
early stages of the growth and on the strain relaxation process. Evidence is given that even …

Functional oxides on silicon have been the subject of in-depth research for more than 20
years. Much of this research has been focused on the quality of the integration of materials …

SrTiO3 (STO) crystalline layers grown on Si open unique perspectives for the monolithic
integration of functional oxides in silicon-based devices, but their fabrication by molecular …

This work reports on the structural properties of an epitaxial Sr Ti O 3 (STO) layer grown by
molecular beam epitaxy on a Si (001) substrate with a two step process. The study, which …

We report the heteroepitaxial growth of SrTiO3 thin films on Si (001) by hybrid molecular
beam epitaxy (hMBE). Here, elemental strontium and the metal‐organic precursor titanium …