[HTML][HTML] Atomic layer deposition for nanoscale oxide semiconductor thin film transistors: review and outlook

HM Kim, DG Kim, YS Kim, M Kim… - International Journal of …, 2023 - iopscience.iop.org
Since the first report of amorphous In–Ga–Zn–O based thin film transistors, interest in oxide
semiconductors has grown. They offer high mobility, low off-current, low process …

[HTML][HTML] CMOS backend-of-line compatible memory array and logic circuitries enabled by high performance atomic layer deposited ZnO thin-film transistor

W Wang, K Li, J Lan, M Shen, Z Wang, X Feng… - Nature …, 2023 - nature.com
The development of high-performance oxide-based transistors is critical to enable very large-
scale integration (VLSI) of monolithic 3-D integrated circuit (IC) in complementary metal …

Anisotropic Electron Mobility and Contact Resistance of β-Ga2O3 Obtained via Radio Frequency Transmission Line Methods on Schottky Devices

HJ Kim, S Hong, C Jang, HJ Jin, H Woo, H Bae, S Im - ACS nano, 2024 - ACS Publications
Monoclinic semiconducting β-Ga2O3 has drawn attention, particularly because its thin film
could be achieved via mechanical exfoliation from bulk crystals, which is analogous to van …

Hf-doped ZnO transistor with high bias stability and high field-effect mobility by modulation of oxygen vacancies and interfaces

Y Tang, P Tan, Y Luo, Z Zhang, L Luo… - Journal of Materials …, 2023 - Elsevier
ZnO-based thin film transistors (TFTs) with high bias stability are challenging due to the
intrinsic defects and overhigh interface trap density. In this work, we fabricated Hf-doped …

Intermittent O2 Plasma Treatment as a Novel Strategy to Optimize the Electrical Properties of Nanofibers-Based Transistors

B He, G He, Q Hu, W Wang, Y Li… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
In this work, intermittent O 2 plasma treatment (IOPT) is demonstrated to optimize the
electrical performance of In 2 O 3-based thin-film transistors (TFTs) based on …

CMOS Logic and Capacitorless DRAM by Stacked Oxide Semiconductor and Poly-Si Transistors for Monolithic 3-D Integration

Z Wang, L Zheng, Z Lin, J Zhao, W Tang… - … on Electron Devices, 2024 - ieeexplore.ieee.org
In this work, we demonstrate capacitorless dynamic random access memory (DRAM) and
complementary metal-oxide–semiconductor (CMOS) logic circuits by vertically stacked ZnO …

Aqueous solution-processed In2O3 TFTs using focused plasma in gas mixtures

XL Wang, HL Zhao, F Shan, SK Shi, JY Lee… - Applied Surface …, 2024 - Elsevier
Solution-processed indium oxide (In 2 O 3) thin films have been studied widely as active
layers for transparent semiconducting devices because of their high charge carrier …

[HTML][HTML] Controlled Synthesis and Growth Mechanism of Two-Dimensional Zinc Oxide by Surfactant-Assisted Ion-Layer Epitaxy

C Huang, Q Sun, Z Chen, D Wen, Z Tan, Y Lu, Y He… - Crystals, 2022 - mdpi.com
Two-dimensional (2D) zinc oxide (ZnO) has attracted much attention for its potential
applications in electronics, optoelectronics, ultraviolet photodetectors, and resistive sensors …

Enhanced Stability Performance of Transparent Ozone ALD ZnO Thin-Film Transistors With SiAlOX Dielectric

W Zhao, N Zhang, C Yao, J Zhang… - … on Electron Devices, 2022 - ieeexplore.ieee.org
A new method is proposed to improve the stability performance of zinc oxide (ZnO) thin-film
transistors (TFTs) by reducing density of oxygen vacancies and enlarging valance band …

Enhancement of electrical characteristics of SnGaO thin-film transistors via argon and oxygen plasma treatment

Y Lu, X Dai, J Yang, Y Liu, D Cao, F Lin, F Liu - Vacuum, 2024 - Elsevier
The impact of Ar or O 2 plasma treatment on the electrical characteristics of SnGaO thin film
transistors (TFTs) fabricated via solution method was examined. The findings of the study …