Toward 2.5 D structures for multi-channel MEMS acoustic-based digital isolators using through silicon openings
H Sadrimanesh, Y Blaquière… - 2023 21st IEEE …, 2023 - ieeexplore.ieee.org
In this paper, a piezoelectric MEMS-based digital isolator by the medium of air for
transferring ultrasound waves between the transmitter (Tx) and receiver (Rx) is presented. A …
transferring ultrasound waves between the transmitter (Tx) and receiver (Rx) is presented. A …
Representation of CMUT-based isolation transformer by means of an electrical two-port network
It has been shown in previous works that Capacitive Micromachined Ultrasonic Transducers
(CMUT) could be an attractive alternative for the development of galvanically isolated …
(CMUT) could be an attractive alternative for the development of galvanically isolated …