Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

Piezoelectric inertia motors—also known as stick-slip motors or (smooth) impact drives—use
the inertia of a body to drive it in small steps by means of an uninterrupted friction contact. In …

Nanotechnology is the science of understanding matter and the control of matter at
dimensions of 100 nm or less. Encompassing nanoscale science, engineering, and …

The design, identification, and control of a novel, flexure-based, piezoelectric stack-actuated
XY nanopositioning stage are presented in this paper. The main goal of the design is to …

A new mechanical scanner design for a high-speed atomic force microscope (AFM) is
presented and discussed in terms of modeling and control. The positioning range of this …

Piezoelectric tube scanners have emerged as the most widely used nanopositioning
technology in modern scanning probe microscopes. Despite their impressive properties …

This paper presents a novel real-time inverse hysteresis compensation method for
piezoelectric actuators exhibiting asymmetric hysteresis effect. The proposed method …

Nanomanipulation with atomic force microscopes (AFMs) for nanoparticles with overall sizes
on the order of 10 nm has been hampered in the past by the large spatial uncertainties …

The micro/nano positioning system discussed in this paper includes a piezoelectric actuator
(PEA) and flexure-hinge-based positioning mechanism. Due to the existence of the …

In this study, the actuator load force of a nanopositioning stage is utilized as a feedback
variable to achieve both tracking and damping. The transfer function from the applied …