Hyperdoped silicon materials: from basic materials properties to sub-bandgap infrared photodetectors

MJ Sher, EG Hemme - Semiconductor Science and Technology, 2023 - iopscience.iop.org
Hyperdoping silicon, which introduces deep-level dopants into Si at concentrations near one
atomic percent, drastically changes its optoelectronic properties. We review recent progress …

Hyperdoped silicon: Processing, properties, and devices

Z Tong, M Bu, Y Zhang, D Yang… - Journal of Semiconductors, 2022 - iopscience.iop.org
Hyperdoping that introduces impurities with concentrations exceeding their equilibrium
solubility has been attracting great interest since the tuning of semiconductor properties …

Broadband-spectral-responsivity of black silicon photodetector with high gain and sub-bandgap sensitivity by titanium hyperdoping

S Huang, J Cao, G Song, J Cao, Y Lu, Q Wu… - Optics & Laser …, 2024 - Elsevier
Silicon, as one of the most essential semiconducting materials, is widely applied in various
photodetection applications due to its high portability, convenient preparation, and …

Zinc-hyperdoped silicon photodetectors fabricated by femtosecond laser with sub-bandgap photoresponse

J Fu, J Cong, L Cheng, D Yang… - … Science and Technology, 2022 - iopscience.iop.org
Developing a low-cost, room-temperature operated and complementary metal-oxide-
semiconductor (CMOS) compatible near infrared silicon photodetector is of interest for …

High-responsivity graphene/hyperdoped-silicon heterostructure infrared photodetectors

Z Wang, X Yu, X Qiu, J Fu, D Yang - Optics & Laser Technology, 2022 - Elsevier
Strong sub-bandgap absorption of hyperdoped silicon caused by an impurity deep band has
attracted a lot of interest in recent years, which is promising for photodetector application …

Hyperdoped crystalline silicon for infrared photodetectors by pulsed laser melting: a review

J Fu, D Yang, X Yu - physica status solidi (a), 2022 - Wiley Online Library
Infrared photodetectors based on crystalline silicon have attracted much attention due to
their low cost and good compatibility with complementary metal–oxide–semiconductor …

Creating zinc-hyperdoped silicon with modulated conduction type by femtosecond laser irradiation

ZY Ren, JH Zhao, C Li, ZG Chen, QD Chen - Journal of Alloys and …, 2023 - Elsevier
Silicon, as the earth-abundant semiconductor, has low cost and good compatibility with
mature complementary metal-oxide-semiconductor technology. Therefore, instead of …

The Mechanism Behind the Annealing‐Induced Reduction of Infrared Absorption in Zinc‐Hyperdoped Silicon

Z Hu, J Fu, L Cheng, D Ding, J Cong… - … status solidi (a), 2024 - Wiley Online Library
Pulsed laser hyperdoping is widely investigated as an effective method for expanding the
infrared absorption of silicon. Prior to further device fabrication, thermal treatment is …

Nanosecond laser annealing processed surface-structured hyperdoped silicon for efficient near-infrared detection

L Cheng, X Lv, D Ding, L Yang, D Yang, X Yu - Nanotechnology, 2024 - iopscience.iop.org
Surface-structured engineering of hyperdoped silicon can effectively facilitate the absorption
of sub-bandgap photons in pristine single-crystal silicon (sc-Si). Here, we conducted …

Thermal activation mechanism of sulfur impurities in sulfur-hyperdoped silicon films

BY Cao, HW Yang, YJ Chen, YB Lin, YJ Yang… - Materials Science in …, 2022 - Elsevier
Thermal annealing has been widely used in the fabrication of microelectronic devices.
However, the sub-bandgap infrared (wavelength λ= 1100–2500 nm) absorption of deep …