Facilitating complex thin film deposition by using magnetron sputtering: a review

J Li, GK Ren, J Chen, X Chen, W Wu, Y Liu, X Chen… - Jom, 2022 - Springer
In light of the low deposition temperature and high sputtering rate, a magnetron sputtering
(MS) technique has been widely used for fabricating various kinds of thin films with special …

Transparent conducting oxides—an up-to-date overview

A Stadler - Materials, 2012 - mdpi.com
Transparent conducting oxides (TCOs) are electrical conductive materials with comparably
low absorption of electromagnetic waves within the visible region of the spectrum. They are …

AZO (Al: ZnO) thin films with high figure of merit as stable indium free transparent conducting oxide

B Sarma, D Barman, BK Sarma - Applied Surface Science, 2019 - Elsevier
This work presents a broad study of transparent and conducting Al-doped ZnO (AZO) thin
films that could replace indium tin oxide (ITO) as transparent electrode in optoelectronic …

Magnetron sputtering for ZnO: Ga scintillation film production and its application research status in nuclear detection

X Wen, Q Zhang, Z Shao - Crystals, 2019 - mdpi.com
As a wide band-gap and direct transition semiconductor material, ZnO has good scintillation
performance and strong radiation resistance, but it also has a serious self-absorption …

Preparation and characteristic of ZnO thin film with high and low resistivity for an application of solar cell

WJ Jeong, SK Kim, GC Park - Thin Solid Films, 2006 - Elsevier
Al-doped zinc oxide (AZO) and undoped zinc oxide (UZO) films for the use as a transparent
conductor and buffer layer of solar cell have been prepared using RF magnetron sputtering …

Optical properties of Al-doped ZnO thin films by ellipsometry

QH Li, D Zhu, W Liu, Y Liu, XC Ma - Applied surface science, 2008 - Elsevier
Al-doped ZnO thin films (AZO) were prepared on Si (100) substrates by using sub-molecule
doping technique. The Al content was controlled by varying Al sputtering time. The as …

Structure and properties of transparent conductive doped ZnO films by pulsed laser deposition

SM Park, T Ikegami, K Ebihara, PK Shin - Applied Surface Science, 2006 - Elsevier
High quality transparent conductive ZnO thin films were deposited on quartz glass
substrates using pulsed laser deposition (PLD). We varied the growth conditions such as the …

Optimization of Al-doped ZnO films for low loss plasmonic materials at telecommunication wavelengths

H Kim, M Osofsky, SM Prokes, OJ Glembocki… - Applied Physics …, 2013 - pubs.aip.org
Al-doped ZnO (AZO) thin films were deposited on glass substrates by pulsed laser
deposition for low loss plasmonic applications in the near IR (NIR). The effect of oxygen …

Preparation and characterization of Al doped ZnO thin films by sol–gel process

J Li, J Xu, Q Xu, G Fang - Journal of alloys and compounds, 2012 - Elsevier
Transparent conductive ZnO films doped with 0–5mol% of Al3+ (or AZO films) were
deposited on the soda–lime glass substrates by sol–gel multilayer dip-coating. The effects of …

Study and improvement of aluminium doped ZnO thin films: Limits and advantages

AC Aragonès, A Palacios-Padrós… - Electrochimica …, 2013 - Elsevier
ZnO: Al films were deposited at 70° C at a fixed− 1.1 V potential onto ITO substrates from a
0.01 M Zn (NO 3) 2+ x Al (NO 3) 3· 9H 2 O electrochemical bath, with Al 3+ concentrations …