Characterization of compact ICP ion source for focused ion beam applications
A compact, high brightness 13.56 MHz inductively coupled plasma ion source without any
axial or radial multicusp magnetic fields is designed for the production of a focused ion …
axial or radial multicusp magnetic fields is designed for the production of a focused ion …
Breaking the 10 nm barrier using molecular ions in nuclear microprobes
The spatial resolution plays a crucial role in determining the performance of a nuclear
microprobe. However, the formation of spatial resolutions below 10 nm remains a challenge …
microprobe. However, the formation of spatial resolutions below 10 nm remains a challenge …
FANM: A software for focus and aberrations of nuclear microprobe
Y Dou, JA Van Kan - Ultramicroscopy, 2021 - Elsevier
Abstract Focus and Aberrations of Nuclear Microprobe (FANM) is a new beam optics
package to achieve fast and accurate design of a nuclear microprobe. FANM achieves a …
package to achieve fast and accurate design of a nuclear microprobe. FANM achieves a …
Ion beams and their applications in high-resolution probe formation
SK Guharay, J Orloff, M Wada - IEEE Transactions on Plasma …, 2005 - ieeexplore.ieee.org
The most critical demand for high-brightness ion beams emerged from the realm of industrial
applications of focused ion beams and it was met by using liquid metal ion source …
applications of focused ion beams and it was met by using liquid metal ion source …
High brightness rf ion source for accelerator-based microprobe facilities
SN Mordyk, VI Voznyy, VI Miroshnichenko… - Review of scientific …, 2004 - pubs.aip.org
The article discusses possible ways of increasing beam brightness in radio frequency (rf) ion
sources. The characteristics of rf ion sources with different permanent magnet systems are …
sources. The characteristics of rf ion sources with different permanent magnet systems are …
Hydrogen/helium ion injector for accelerator-based microprobe facilities
SM Mordyk, VI Voznyy, VI Miroshnichenko… - Nuclear Instruments and …, 2005 - Elsevier
The hydrogen/helium ion injector comprising a newly designed helicon RF ion source with
higher brightness (∼ 100A/(m2rad2eV) for helium and∼ 50A/(m2rad2eV) for hydrogen) …
higher brightness (∼ 100A/(m2rad2eV) for helium and∼ 50A/(m2rad2eV) for hydrogen) …
Investigation of helicon ion source extraction systems
S Mordyk, V Miroshnichenko, D Shulha… - Review of Scientific …, 2008 - pubs.aip.org
Various versions of an extraction system for a helicon ion source have been investigated in
high plasma density (> 10 12 cm− 3) modes. The measurements of the plasma density were …
high plasma density (> 10 12 cm− 3) modes. The measurements of the plasma density were …
Development of the RF ion sources for focused ion beam accelerators
The paper presents the results of investigations of ion sources developed in the IAP of NAS
of Ukraine for generation of high brightness ion beams with small energy spread. A series of …
of Ukraine for generation of high brightness ion beams with small energy spread. A series of …
Development of the RF ion source for use in accelerator-based microprobes
V Miroshnichenko, S Mordyk, D Shulha… - Nuclear Instruments and …, 2007 - Elsevier
A helicon and a multicusp version of radio-frequency ion sources with compact permanent
magnet systems have developed and tested to show the following performance data …
magnet systems have developed and tested to show the following performance data …
[PDF][PDF] High-plasma-density helicon source for ion beam application
S Mordyk, V Voznyy, V Miroshnichenko… - … Congress on Plasma …, 2006 - researchgate.net
At present the increase of ion beam brightness in ion beam applications remains a
challenging problem. High beam brightness can be achieved by extracting the beam with …
challenging problem. High beam brightness can be achieved by extracting the beam with …