Characterization of compact ICP ion source for focused ion beam applications

PY Nabhiraj, R Menon, GM Rao, S Mohan… - Nuclear Instruments and …, 2010 - Elsevier
A compact, high brightness 13.56 MHz inductively coupled plasma ion source without any
axial or radial multicusp magnetic fields is designed for the production of a focused ion …

Breaking the 10 nm barrier using molecular ions in nuclear microprobes

Y Dou, T Osipowicz, JA van Kan - Ultramicroscopy, 2023 - Elsevier
The spatial resolution plays a crucial role in determining the performance of a nuclear
microprobe. However, the formation of spatial resolutions below 10 nm remains a challenge …

FANM: A software for focus and aberrations of nuclear microprobe

Y Dou, JA Van Kan - Ultramicroscopy, 2021 - Elsevier
Abstract Focus and Aberrations of Nuclear Microprobe (FANM) is a new beam optics
package to achieve fast and accurate design of a nuclear microprobe. FANM achieves a …

Ion beams and their applications in high-resolution probe formation

SK Guharay, J Orloff, M Wada - IEEE Transactions on Plasma …, 2005 - ieeexplore.ieee.org
The most critical demand for high-brightness ion beams emerged from the realm of industrial
applications of focused ion beams and it was met by using liquid metal ion source …

High brightness rf ion source for accelerator-based microprobe facilities

SN Mordyk, VI Voznyy, VI Miroshnichenko… - Review of scientific …, 2004 - pubs.aip.org
The article discusses possible ways of increasing beam brightness in radio frequency (rf) ion
sources. The characteristics of rf ion sources with different permanent magnet systems are …

Hydrogen/helium ion injector for accelerator-based microprobe facilities

SM Mordyk, VI Voznyy, VI Miroshnichenko… - Nuclear Instruments and …, 2005 - Elsevier
The hydrogen/helium ion injector comprising a newly designed helicon RF ion source with
higher brightness (∼ 100A/(m2rad2eV) for helium and∼ 50A/(m2rad2eV) for hydrogen) …

Investigation of helicon ion source extraction systems

S Mordyk, V Miroshnichenko, D Shulha… - Review of Scientific …, 2008 - pubs.aip.org
Various versions of an extraction system for a helicon ion source have been investigated in
high plasma density (> 10 12 cm− 3) modes. The measurements of the plasma density were …

Development of the RF ion sources for focused ion beam accelerators

V Voznyi, V Miroshnichenko, S Mordyk, D Shulha… - 2013 - essuir.sumdu.edu.ua
The paper presents the results of investigations of ion sources developed in the IAP of NAS
of Ukraine for generation of high brightness ion beams with small energy spread. A series of …

Development of the RF ion source for use in accelerator-based microprobes

V Miroshnichenko, S Mordyk, D Shulha… - Nuclear Instruments and …, 2007 - Elsevier
A helicon and a multicusp version of radio-frequency ion sources with compact permanent
magnet systems have developed and tested to show the following performance data …

[PDF][PDF] High-plasma-density helicon source for ion beam application

S Mordyk, V Voznyy, V Miroshnichenko… - … Congress on Plasma …, 2006 - researchgate.net
At present the increase of ion beam brightness in ion beam applications remains a
challenging problem. High beam brightness can be achieved by extracting the beam with …