Microsystems with capabilities of acoustic signal perception and recognition are widely used
in unattended monitoring applications. In order to realize long-term and large-scale …

Recently there has been a significant increase in demand for wireless sensor networks, as
their field of application is rapidly expanding, driven mostly by the growing importance and …

A self-powered triboelectric accelerometer miniaturized to the micro-scale is presented. This
micro triboelectric accelerometer (MTEA) was fabricated using CMOS-compatible …

A self-powered micro-electromechanical systems (MEMS) inertial switch has been proposed
for potential wake-up application without additional power consumption. In comparison with …

Resonance is known to reduce the input energy requirements of various actuator systems.
The favorable effects of resonance, however, are limited to a narrow frequency range. To …

This report describes a novel microfabrication platform to realize an acceleration sensor
switch with top contacts in the out-of-plane direction. The platform utilizes conventional …

3-D-printed structures integrated with laser-cut spiral PZT bimorphs are used to obtain low
mechanical resonance frequencies for energy harvesting and a vibration-activated …

We present an omnidirectional energy harvester with lowest resonance mode at 14.85 Hz.
The geometry is designed as a spiral shaped, 500 μm thick PZT lateral bimorph to achieve a …

This paper reports a NEMS electrostatic RF wake-up switch capable of detection sensitivity
reaching− 25 dBm off resonance with sub-pW passive power consumption at less than 1.5 V …

Recent pushes to reduce wireless sensor node power consumption have targeted sensors
detecting the signal of interest, eg acoustic, acceleration, rotation, and use the energy in the …