Passivation of III–V surfaces with crystalline oxidation

P Laukkanen, MPJ Punkkinen, M Kuzmin… - Applied Physics …, 2021 - pubs.aip.org
Control of interfacial physicochemical properties associated with device materials to
minimize the impact of point defects on device performance has been a dominant theme in …

Crystallinity Effect on Electrical Properties of PEALD–HfO2 Thin Films Prepared by Different Substrate Temperatures

XY Zhang, J Han, DC Peng, YJ Ruan, WY Wu, DS Wuu… - Nanomaterials, 2022 - mdpi.com
Hafnium oxide (HfO2) thin film has remarkable physical and chemical properties, which
makes it useful for a variety of applications. In this work, HfO2 films were prepared on silicon …

Investigation of electrical characterization of Al/HfO2/p-Si structures in wide temperature range

S Bengi, E Yükseltürk, MM Bülbül - Journal of Materials Science: Materials …, 2023 - Springer
We studied the I–V characteristics of Al/HfO2/p-Si structure investigated in a wide
temperature range of 80–400 K. The zero-bias barrier height (Φ B) and ideality factor (n) …

Ultrahigh Vacuum Annealing of Atomic-Layer-Deposited Y2O3/GaAs in Perfecting Heterostructural Chemical Bonding for Effective Passivation

WS Chen, KY Lin, YHG Lin, HW Wan… - ACS Applied …, 2023 - ACS Publications
Direct deposition of high-dielectric-constant oxides on high-mobility semiconductors with low
trap densities is the key to high-performance metal–oxide–semiconductor (MOS) devices …

Molecular beam epitaxy, atomic layer deposition, and multiple functions connected via ultra-high vacuum

KY Lin, HW Wan, KHM Chen, YT Fanchiang… - Journal of Crystal …, 2019 - Elsevier
Molecular beam epitaxy (MBE) invented for the growth of compound semiconductors in the
70's has been successfully extended to the advanced growth of metals, oxides …

Capacitorless one-transistor dynamic random-access memory based on asymmetric double-gate Ge/GaAs-heterojunction tunneling field-effect transistor with n-doped …

YJ Yoon, JH Seo, IM Kang - Japanese Journal of Applied …, 2018 - iopscience.iop.org
In this work, we present a capacitorless one-transistor dynamic random-access memory (1T-
DRAM) based on an asymmetric double-gate Ge/GaAs-heterojunction tunneling field-effect …

Analysis of HfO2 charge trapping layer characteristics after UV treatment

J Kim, J Kim, EC Cho, J Yi - ECS Journal of Solid State Science …, 2021 - iopscience.iop.org
The improvement in the charge storage characteristics in a non-volatile memory (NVM)
device employing an ultraviolet (UV)-treated hafnium oxide (HfO 2) layer as the charge …

Effective passivation of p-and n-type In0. 53Ga0. 47As in achieving low leakage current, low interfacial traps, and low border traps

YHG Lin, HW Wan, LB Young, KH Lai, J Liu… - Journal of Applied …, 2024 - pubs.aip.org
We have attained low leakage current, low interfacial traps, and low border traps by
effectively passivating both p-and n-In0. 53Ga0. 47As (InGaAs) surfaces using the same …

GaAs MOSFETs with in situ Y2O3 dielectric: attainment of nearly thermally limited subthreshold slope and enhanced drain current via accumulation

J Liu, LB Young, YHG Lin, HW Wan… - Japanese Journal of …, 2023 - iopscience.iop.org
Abstract Planar GaAs (100) depletion-mode (D-mode) MOSFETs as passivated with in situ
deposited Al 2 O 3/Y 2 O 3 dielectric have shown enhancement of the drain current by 167 …

Fundamental Understanding of Oxide Defects in HfO2 and Y2O3 on GaAs(001) with High Thermal Stability

HW Wan, YJ Hong, LB Young… - 2019 IEEE …, 2019 - ieeexplore.ieee.org
Oxide defects in HfO 2 and Y 2 O 3 on GaAs (001) are characterized by analyzing
capacitance-voltage (CV) hysteresis of metal-oxide-semiconductor capacitor (MOSCAP) …