ZrO2 thin films on Si substrate

YH Wong, KY Cheong - Journal of Materials Science: Materials in …, 2010 - Springer
In the advancement of metal–oxide–semiconductor technology, Si-based semiconductor,
with SiO 2 as outstanding dielectric, has been dominating microelectronic industry for …

[HTML][HTML] From zirconia to yttria: Sampling the YSZ phase diagram using sputter-deposited thin films

T Götsch, W Wallisch, M Stöger-Pollach, B Klötzer… - AIP Advances, 2016 - pubs.aip.org
Yttria-stabilized zirconia (YSZ) thin films with varying composition between 3 mol% and 40
mol% have been prepared by direct-current ion beam sputtering at a substrate temperature …

Photocatalytic activity of ZrO2 nanoparticles prepared by electrical arc discharge method in water

AA Ashkarran, SAA Afshar, SM Aghigh - Polyhedron, 2010 - Elsevier
ZrO2 nanoparticles were synthesized through arc discharge of zirconium electrodes in
deionized (DI) water. X-ray diffraction (XRD) analysis of the as prepared nanoparticles …

Corrosion barrier alumina/zirconia bilayer stack on low Cr steel by direct liquid injection metalorganic chemical vapor deposition

A Jaud, S Ponton, A Sekkat, AA Aal, T Sauvage… - Surface and Coatings …, 2023 - Elsevier
Numerous industrial fields necessitate the development of advanced metallic materials
presenting high corrosion resistance in aqueous media and being less expensive than …

A novel protocol for selective synthesis of monoclinic zirconia nanoparticles as a heterogeneous catalyst for condensation of 1, 2-diamines with 1, 2-dicarbonyl …

M Jafarpour, E Rezapour… - New Journal of …, 2014 - pubs.rsc.org
ZrO2 nanocatalyst has been obtained successfully using novel and safe agents through a
simple and safe sol–gel method (polymerizing–complexing) and characterized by XRD, FT …

Synthesis of ZrO2 nanoparticles using reactive magnetron sputtering and their structural, morphological and thermal studies

M Verma, V Kumar, A Katoch - Materials Chemistry and Physics, 2018 - Elsevier
Intensive and extensive research is focused on the synthesis of ZrO 2 nanoparticles being
used in different applications such as photocatalysis, sensors, coatings and wastewater …

Synthesis of Oxygen and Nitrogen Containing Heterocycles using Zirconium Dioxide/Mixed Oxide Nanoparticles as Reusable Green Catalysts: A Comprehensive …

PV Ledade, TL Lambat, JK Gunjate… - Current Organic …, 2023 - ingentaconnect.com
The remarkable improvements in organic synthesis facilitated by zirconium dioxide-based
nanoparticles are updated and summarized in this review. The ZrO2 acts as a versatile …

Phase transformation and enhanced blue photoluminescence of zirconium oxide poly-crystalline thin film induced by Ni ion beam irradiation

V Chauhan, D Gupta, N Koratkar, R Kumar - Scientific Reports, 2021 - nature.com
Swift heavy ions (SHI) irradiation of Nickel (Ni) beam with different ions fluence bring the
modifications in the functional properties of radio frequency (RF) grown zirconium oxide …

[PDF][PDF] The properties of RF sputtered zirconium oxide thin films at different plasma gas ratio

JY Park, JK Heo, YC Kang - Bulletin of The Korean Chemical …, 2010 - researchgate.net
Zirconium oxide thin films deposited on the p-type Si (100) substrates by radio-frequency
(RF) reactive magnetron sputtering with different plasma gas ratios have been studied by …

Highly self-oriented growth of (020) and (002) monoclinic HfO2 thick films using laser chemical vapor deposition

S Matsumoto, Y Kaneda, A Ito - Ceramics International, 2020 - Elsevier
Abstract Monoclinic hafnia (m-HfO 2) films were prepared on polycrystalline AlN substrates
via thermal and laser chemical vapor deposition (thermal CVD and laser CVD). Highly self …