Micro‐and Nanostructure of Layered Si\Sn\Si Films, Formed by Vapor Deposition
VB Neimash, PY Shepelyavyi… - Journal of …, 2022 - Wiley Online Library
The peculiarities of surface relief of the Si‐Sn‐Si layered films, used to produce the silicon
nanocrystals with properties of quantum dots, were studied by the methods of electron and …
nanocrystals with properties of quantum dots, were studied by the methods of electron and …