55.4 GHz Bulk Acoustic Resonator in Thin-Film Scandium Aluminum Nitride
This study describes a sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic
resonator (FBAR) at 55.4 GHz. The resonator leverages the third-order symmetric (S3) mode …
resonator (FBAR) at 55.4 GHz. The resonator leverages the third-order symmetric (S3) mode …
Coupled vibrations of thickness-extensional FBARs under stress-strain biasing state
The method of frequency spectrum quantitative prediction (FSQP) is extended to investigate
high-frequency and mode-coupling vibrations of piezoelectric film bulk acoustic resonators …
high-frequency and mode-coupling vibrations of piezoelectric film bulk acoustic resonators …
High-Performance Film Bulk Acoustic Resonator and Filter Based on an AlScN Film Prepared by a Low-Temperature Staged Deposition Method
Z Chen, K Xu, T Luo, G Zhi, Y Zhu… - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
The poor crystal quality of AlScN films is a serious obstacle to the development of
broadband film bulk acoustic resonator (FBAR) filters. To address this issue, a low …
broadband film bulk acoustic resonator (FBAR) filters. To address this issue, a low …
Millimeter wave thin-film bulk acoustic resonator in sputtered scandium aluminum nitride using platinum electrodes
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic
resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum …
resonators (FBAR) at millimeter wave (mmWave) with high quality factor (Q) using platinum …
X-Band Bulk Acoustic Wave Resonators with High Figure of Merit Based on Al0.8Sc0.2N
Y Zhu, Y Zhang, T Luo, X Yi, G Li - IEEE Electron Device …, 2024 - ieeexplore.ieee.org
Bulk Acoustic Wave (BAW) resonators encounter two significant challenges in the super
high frequency (SHF) band. Firstly, the thicknesses of the piezoelectric layer and electrodes …
high frequency (SHF) band. Firstly, the thicknesses of the piezoelectric layer and electrodes …
High-k2eff AlSc0. 095N-based two-dimensional coupled mode resonators with transducer design toward 5G application
Z Sun, S Lv, W Ye, X Sun, H Sun, J Zhao - Microelectronics Journal, 2024 - Elsevier
This paper presents the two-dimensional coupled mode resonators (TCMRs) based on 9.5%
scandium-doped aluminum nitride (AlScN) films. We report the design, fabrication, and …
scandium-doped aluminum nitride (AlScN) films. We report the design, fabrication, and …
Advanced technologies of FBAR for tuning effective electromechanical coupling coefficient
The film bulk acoustic wave resonator (FBAR) is one of the most popular devices in the radio
frequency field. Numerous researchers are simultaneously working to develop an effective …
frequency field. Numerous researchers are simultaneously working to develop an effective …
High-Frequency Vibrations of Piezoelectric Film Bulk Acoustic Resonators Under Complex Initial Stress-Strain Biasing States
The method of frequency spectrum quantitative prediction (FSQP) is extended to investigate
high-frequency vibrations of piezoelectric film bulk acoustic resonators (FBARs) in the …
high-frequency vibrations of piezoelectric film bulk acoustic resonators (FBARs) in the …