Scanning micromirror platform based on MEMS technology for medical application
This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …
biomedical applications. This also includes a biomedical micro robot for precise …
Design and fabrication of a novel XYθz monolithic micro-positioning stage driven by NiTi shape-memory-alloy actuators
This paper reports a new shape-memory-alloy (SMA) micro-positioning stage. The device
has been monolithically micro-machined with a single fabrication step. The design …
has been monolithically micro-machined with a single fabrication step. The design …
A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography
This paper reports a miniature optical coherence tomography (OCT) probe and high-
resolution 3-D OCT imaging results obtained with this side-view probe. The probe is only 2.8 …
resolution 3-D OCT imaging results obtained with this side-view probe. The probe is only 2.8 …
A three-degree-of-freedom thin-film PZT-actuated microactuator with large out-of-plane displacement
A novel three degree-of-freedom microactuator based on thin-film lead-zirconate-titanate
(PZT) is described with its detailed structural model. Its central rectangular-shaped mirror …
(PZT) is described with its detailed structural model. Its central rectangular-shaped mirror …
A Fourier transform spectrometer based on an electrothermal MEMS mirror with improved linear scan range
W Wang, J Chen, AS Zivkovic, H Xie - Sensors, 2016 - mdpi.com
A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled,
electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed …
electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed …
Design and simulation of a MEMS analog micro-mirror with improved rotation angle
S Afrang, H Mobki, M Hassanzadeh… - Microsystem …, 2019 - Springer
This paper presents design and simulation of a MEMS analog torsional micro-mirror with
improved rotation angle. The working range and consequently the rotation angle limitation of …
improved rotation angle. The working range and consequently the rotation angle limitation of …
Multi-response optimization of electrothermal micromirror using desirability function-based response surface methodology
The design of a micromirror for biomedical applications requires multiple output responses
to be optimized, given a set of performance parameters and constraints. This paper presents …
to be optimized, given a set of performance parameters and constraints. This paper presents …
Microelectromagnetic actuator based on a 3D printing process for fiber scanner application
B Sun, H Nogami, Y Pen… - Journal of Micromechanics …, 2015 - iopscience.iop.org
A novel electromagnetic-actuated fiber scanner has been proposed for ultra-thin scanning
fiber endoscope application. A free-fixed optical fiber cantilever with a cylindrical magnet …
fiber endoscope application. A free-fixed optical fiber cantilever with a cylindrical magnet …
An approach for achieving uniform temperature distribution on the bimorphs of electrothermal micromirrors
Bimorph-based electrothermal micromirrors can generate large lateral-shift-free (LSF)
vertical displacement by employing electrothermal bimorph actuators with multiple segments …
vertical displacement by employing electrothermal bimorph actuators with multiple segments …
A Photosensitive Polyimide-SiO2 Bimorph based Electrothermal Micromirror with High Impact Resistance
Resistance to impact damage is highly favored in hand-held optical scanning applications.
In this work, a lateral-shift-free (LSF) electrothermal micromirror with high impact resistance …
In this work, a lateral-shift-free (LSF) electrothermal micromirror with high impact resistance …