Scanning micromirror platform based on MEMS technology for medical application

E Pengwang, K Rabenorosoa, M Rakotondrabe… - Micromachines, 2016 - mdpi.com
This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

Design and fabrication of a novel XYθz monolithic micro-positioning stage driven by NiTi shape-memory-alloy actuators

A AbuZaiter, OF Hikmat, M Nafea… - Smart Materials and …, 2016 - iopscience.iop.org
This paper reports a new shape-memory-alloy (SMA) micro-positioning stage. The device
has been monolithically micro-machined with a single fabrication step. The design …

A 2.8-mm imaging probe based on a high-fill-factor MEMS mirror and wire-bonding-free packaging for endoscopic optical coherence tomography

SR Samuelson, L Wu, J Sun, S Choe… - Journal of …, 2012 - ieeexplore.ieee.org
This paper reports a miniature optical coherence tomography (OCT) probe and high-
resolution 3-D OCT imaging results obtained with this side-view probe. The probe is only 2.8 …

A three-degree-of-freedom thin-film PZT-actuated microactuator with large out-of-plane displacement

J Choi, Z Qiu, CH Rhee, T Wang… - … of Micromechanics and …, 2014 - iopscience.iop.org
A novel three degree-of-freedom microactuator based on thin-film lead-zirconate-titanate
(PZT) is described with its detailed structural model. Its central rectangular-shaped mirror …

A Fourier transform spectrometer based on an electrothermal MEMS mirror with improved linear scan range

W Wang, J Chen, AS Zivkovic, H Xie - Sensors, 2016 - mdpi.com
A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled,
electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed …

Design and simulation of a MEMS analog micro-mirror with improved rotation angle

S Afrang, H Mobki, M Hassanzadeh… - Microsystem …, 2019 - Springer
This paper presents design and simulation of a MEMS analog torsional micro-mirror with
improved rotation angle. The working range and consequently the rotation angle limitation of …

Multi-response optimization of electrothermal micromirror using desirability function-based response surface methodology

MM Saleem, U Farooq, U Izhar, US Khan - Micromachines, 2017 - mdpi.com
The design of a micromirror for biomedical applications requires multiple output responses
to be optimized, given a set of performance parameters and constraints. This paper presents …

Microelectromagnetic actuator based on a 3D printing process for fiber scanner application

B Sun, H Nogami, Y Pen… - Journal of Micromechanics …, 2015 - iopscience.iop.org
A novel electromagnetic-actuated fiber scanner has been proposed for ultra-thin scanning
fiber endoscope application. A free-fixed optical fiber cantilever with a cylindrical magnet …

An approach for achieving uniform temperature distribution on the bimorphs of electrothermal micromirrors

Y Tang, J Li, JB Lee, H Xie, L Xu - Sensors and Actuators A: Physical, 2022 - Elsevier
Bimorph-based electrothermal micromirrors can generate large lateral-shift-free (LSF)
vertical displacement by employing electrothermal bimorph actuators with multiple segments …

A Photosensitive Polyimide-SiO2 Bimorph based Electrothermal Micromirror with High Impact Resistance

H Yang, A Ren, Y Ding, Y Lu, T Pan… - 2024 IEEE 37th …, 2024 - ieeexplore.ieee.org
Resistance to impact damage is highly favored in hand-held optical scanning applications.
In this work, a lateral-shift-free (LSF) electrothermal micromirror with high impact resistance …