Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Micro-Electro-Mechanical-System accelerometers have been integral in various applications
for years due to their precision, versatility, and compact size. They have found relevance in …

This paper discusses the opportunities for developing integrated microsystems through a
combination of microelectronic and micromechanical devices together. A brief overview of …