Method of forming trench gate field effect transistor with recessed mesas

S Sapp, H Yilmaz, CL Rexer, D Calafut - US Patent 7,504,306, 2009 - Google Patents
US PATENT DOCUMENTS 5,326,711 A 7/1994 Malhi 5,346,834 A 9, 1994. Hisamoto et al.
4,326,332 A 4, 1982 Kenney et al. 5,349,224 A 9, 1994 Gilbert et al. 4,337,474 A 6, 1982 …

Semiconductor power device having a top-side drain using a sinker trench

TE Grebs, GM Dolny - US Patent 7,352,036, 2008 - Google Patents
A semiconductor power device includes a substrate of a first conductivity type and an
epitaxial layer of the first conductivity type over and in contact with the substrate. A first …

Method of forming high density trench FET with integrated Schottky diode

P Thorup, A Challa, BD Marchant - US Patent 7,713,822, 2010 - Google Patents
(57) ABSTRACT A method of forming a monolithically integrated trench FET and Schottky
diode includes the following steps. Two trenches are formed extending through an upper …

Semiconductor device and method of manufacturing the same

M Yamaguchi, I Omura, W Saito, T Shinohe… - US Patent …, 2007 - Google Patents
(57) ABSTRACT A semiconductor device comprises a drain layer of first conductivity type,
drift layers of first and second conduc tivity types on the drain layer, an insulating film …

Trench-gate type semiconductor device and manufacturing method therefor

Y Kagawa, A Furukawa, S Hino, H Watanabe… - US Patent …, 2015 - Google Patents
(57) ABSTRACT A trench-gate type semiconductor device that can prevent breakdown of a
gate insulating film caused by a displacement current flowing into a protective diffusion layer …

Power transistor with trench sinker for contacting the backside

TE Grebs, GM Dolny - US Patent 7,732,876, 2010 - Google Patents
(57) ABSTRACT A power transistor includes a first semiconductor region of a first
conductivity type extending over and in contact with a second semiconductor region of the …

Semiconductor device having vertical MOSFET

K Kobayashi - US Patent 7,893,489, 2011 - Google Patents
An ON-resistance of a semiconductor device including a vertical MOSFET whose source
electrode, gate electrode, and drain electrode are formed on a single Surface is reduced. A …

Method of forming a trench structure having one or more diodes embedded therein adjacent a PN junction

CB Kocon, JA Yedinak - US Patent 7,582,519, 2009 - Google Patents
A semiconductor structure is formed as follows. A semiconductor region is formed to have a
P-type region and a N-type region forming a PN junction therebetween. A first trench is …

Semiconductor field effect power switching device

F Hirler - US Patent 8,541,837, 2013 - Google Patents
(57) ABSTRACT A semiconductor device having a semiconductor body, a Source
metallization arranged on a first Surface of the semi conductor body and a trench including a …

Lateral Trench Power MOSFET with reduced gate-to-drain capacitance

TS Chow, K Varadarajan - US Patent App. 11/407,378, 2007 - Google Patents
One embodiment according to the present inven tion includes a lateral MOS device
comprising a gate electrode disposed at least partially in a gate trench for applying a …