Organosilicon compounds as single-source precursors for SiCN films production
E Ermakova, M Kosinova - Journal of Organometallic Chemistry, 2022 - Elsevier
Silicon carbonitride SiCN films have attracted considerable interest due to their outstanding
characteristics, such as dielectric, optical, mechanical properties, thermal stability, oxidation …
characteristics, such as dielectric, optical, mechanical properties, thermal stability, oxidation …
Effect of plasma power on growth process, chemical structure, and properties of PECVD films produced from hexamethyldisilane and ammonia
E Ermakova, V Shayapov, A Saraev… - Surface and Coatings …, 2024 - Elsevier
Silicon carbonitride films were grown by plasma enhanced chemical vapor deposition
(PECVD) using hexamethyldisilane (HMDS) and ammonia initial gas mixture at deposition …
(PECVD) using hexamethyldisilane (HMDS) and ammonia initial gas mixture at deposition …
Laboratory analogues simulating Titan's atmospheric aerosols: Compared chemical compositions of grains and thin films
N Carrasco, F Jomard, J Vigneron, A Etcheberry… - Planetary and Space …, 2016 - Elsevier
Two sorts of solid organic samples can be produced in laboratory experiments simulating
Titan's atmospheric reactivity: grains in the volume and thin films on the reactor walls. We …
Titan's atmospheric reactivity: grains in the volume and thin films on the reactor walls. We …
Mechanical properties of amorphous SiCN films deposited by ion-beam-assisted deposition
I Tanaka, S Matuoka, Y Harada - Diamond and Related Materials, 2022 - Elsevier
This study discusses the fabrication of amorphous silicon carbon nitride (a-SiCN) films by
ion-beam-assisted deposition (IBAD) and investigates their hardness and frictional …
ion-beam-assisted deposition (IBAD) and investigates their hardness and frictional …
Effects of Tetramethyl Silane Concentration on Amorphous SiCN Films Deposited by Microwave Sheath-Voltage Combination Plasma at High Substrate Temperatures
I Tanaka, Y Hatae, Y Harada - MATERIALS TRANSACTIONS, 2024 - jstage.jst.go.jp
Amorphous silicon carbon nitride (a-SiCN) films are known for their exceptional mechanical
properties. This study explores the impact of tetramethylsilane (TMS) concentration on the …
properties. This study explores the impact of tetramethylsilane (TMS) concentration on the …
[PDF][PDF] Master Thesis Final Report
HE SHJ, PSH Solar, GLB d'Hérouville - repository.tudelft.nl
High efficiency silicon heterojunction (SHJ) solar cells have already reached more than 26%
efficiency [1] when tunnel oxide passivated contacts solar cells just broke the 26% barrier at …
efficiency [1] when tunnel oxide passivated contacts solar cells just broke the 26% barrier at …