An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …

We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic
Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the …

This paper presents a frequency-based silicon micromechanical resonant magnetic field
sensor with a high quality factor by using a double-ended tuning fork (DETF). The sensing …

In this paper, an electromagnetic induction based resonant MEMS magnetometer used for
out-of-plane magnetic field sensing is demonstrated. The main structure (named as 4S …

We present a microelectromechanical system (MEMS)-based magnetic field sensor with
simple structural configuration, low power consumption, and linear electrical response. This …

We report a highly sensitive and miniature in-plane resonant Lorentz-force magnetic micro-
sensor operating in air at atmospheric pressure. The concept is based on the detection of …

In this paper, a new analytical method to achieve the maximum signal-to-noise ratio (SNR)
of a micro search coil magnetometer (µSCM) is presented. A planar spiral inductor was …

This paper presents a novel z-axis Lorentz force magnetometer coupled with a low-power
readout integrated circuit. The sensor is fabricated using an industrial process, and exploits …

A microelectromechanical system (MEMS) torsional resonant magnetometer based on
Lorentz force was investigated, consisting of torsional structures, torsional beams, metal …

This study investigates the design and fabrication of magnetic microsensors using the
commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The …