In this review, we have comprehensively elaborated on the various materials suitable for the
infrared (IR) bolometer applications and also provided the underlying mechanisms of …

Epitaxial Ca, Sr, and Pb doped manganite films of various compositions and thickness have
been prepared to tailor metal-to-semiconductor phase transition to room temperature …

The characteristics of infrared (IR) microbolometer arrays utilizing semiconducting YBaCuO
and operating at room temperature are presented. Surface-micromachined structures in the …

A new micromachined microbolometer array structure is presented that utilizes a self-
supporting semiconducting yttrium barium copper oxide (Y-Ba-Cu-O) thin film thermometer …

Polycrystalline films of Mn 1.56 Co 0.96 Ni 0.48 O 4 (MCN) were evaluated for uncooled
bolometric applications grown by chemical solution deposition on amorphous Al 2 O 3 …

Vanadium oxide thin films have been deposited on glass substrates by facing targets dc
reactive sputtering at room temperature for uncooled microbolometers. The temperature …

A heat-sensitive layer (TiO 2− x) was successfully deposited by RF reactive magnetron
sputtering for infrared (IR) image sensors at different relative mass flow of oxygen gas (R O2) …

Vanadium oxide films are widely employed as thermal detectors in uncooled infrared
detection systems due to their high temperature coefficient of resistance near room …

This paper presents the design, modeling and simulation of micromachined, integrated
pressure–thermal sensors on flexible polyimide substrates. Finite element simulations were …

This paper presents design, fabrication and measured performance parameters of
micromachined infrared detectors on polyimide substrates. The detectors are of bolometer …