This study presents the design and fabrication results of an electrothermal micro-electro-
mechanical system (MEMS) actuator. Unlike traditional one-directional U-shaped actuators …

Micro-grippers are highly desired in engineering, robotics, and biomedicine. However, on
the basis of satisfying the requirements of miniaturization, precise manipulation, and low …

This paper presents an electro-thermal micro-actuator based on polymer composite for dual-
stage head positioning systems in hard disk drives (HDDs). This micro-actuator has a pair of …

This paper is devoted to the control design and implementation of the dual-stage actuation
system with a newly developed microthermal actuator (MTA) as the secondary actuator. The …

Slider-level micro-positioners are useful to assist a voice coil motor to perform fine head
positioning over a Tb/in 2 magnetic disk. Recently, a new kind of slider-level micro …

Many micro-electro-mechanical multilayered structures are always subject to residual stress
and cause deformation easily. The induced mechanical deformation will directly affect the …

In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical
systems (MEMS) structures, called “border-bulk micromachining”, is introduced. It aims to …

This paper reports the finite element simulation and experimental results on thermal
mechanical performance of a thermal micro-actuator. This thermal actuator uses a pair of …

Recently, we have developed a polymeric composite electrothermal micro-actuator for dual-
stage applications in hard disk drives (HDDs). The polymer composite was demonstrated …

The book aims at empowering readers with a clear understanding of multi-stage
mechanism, different microactuators' performances, their limitations to control system …