Microelectromechanical systems (MEMS)-based piezoresistive and capacitive microphones
have gained significant attention due to their miniaturization, high performance, and diverse …

This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …

A review is given on sensors fabricated by silicon micromachining technology using the
thermal domain for the measurement of fluid flow. Attention is paid especially to performance …

A surface micromachined pressure sensor for blood pressure measurements has been
commercialized. Using a polysilicon surface micromachining process, a silicon chip with the …

The invention relates to a device for measuring pressure, temperature and/or flow velocity. It
includes a sensor (6) with a Sensor Support body (13) provided with a diaphragm (15) …

This paper presents the development of a micro-machined dual-backplate capacitive
microphone for aeroacoustic measurements. The device theory, fabrication, and …

The first three dimensional (3D) flow sensor probe based on polyimide joints has been
fabricated and successfully tested. The new 3D sensor, which is specially designed for …

The invention relates to a device for measuring pressure, temperature and/or flow velocity. It
includes a sensor (6) with a sensor support body (13) provided with a diaphragm (15) …

A new integrated pressure—flow sensor has been specially designed for measurements in
turbulent gas flows. The pressure sensor is based on polysilicon diaphragm technology and …

The recent development of microscale technologies makes it possible to design complex
microsystems devoted to transport, dosing, mixing, analysis or even synthesis of fluids …