This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

In this paper, we present four design methods to overcome (100) silicon crystalline
anisotropy and achieve mode-matching in wineglass-mode disk resonator gyroscope …

In a MEMS device having a substrate and a moveable micromachined member, a
mechanical structure secures the moveable micromachined member to the substrate …

This paper demonstrates an in-run automatic mode-matching method for a Micro-Electro-
Mechanical systems (MEMS) disk resonator gyroscope (DRG) operating in the n= 3 …

Integrated CMOS-MEMS clamped-clamped beam resonators using metal wet etching
technique are demonstrated with passive temperature compensation through the use of SiO …

Degenerately doped semiconductor materials are deployed within resonant structures to
control the first and higher order temperature coefficients of frequency, thereby enabling …

This paper presents a resonant double-ended tuning fork (DETF) force sensor with an
experimentally demonstrated resolution of 7 nN and a compressive load range of 0.08 N …

This paper proposes a new approach for parametric excitation, parametric amplification, and
linear and nonlinear tuning of the folded-beam interdigitated comb drive oscillator. The …

Degenerately doped semiconductor materials are deployed within resonant structures to
control the first and higher order temperature coefficients of frequency, thereby enabling …