Vibration suppression with use of input shaping control in machining

M Kasprowiak, A Parus, M Hoffmann - Sensors, 2022 - mdpi.com
This article discusses the problem of vibrations during machining. The manufacturing
process of generator turbine blades is highly complex. Machining using Computerized …

Motion Control of Wafer Scanners in Lithography Systems: From Setpoint Generation to Multi-Stage Coordination

F Song, Y Liu, Y Dong, X Chen… - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
Accurate pattern transfer, coupled with stringent requirements for throughput and quality in
lithography systems, necessitates the wafer scanner executing an aggressive motion with …

[PDF][PDF] Esnek bağlı bir robot kolunun titreşimlerinin giriş şekillendirme ile kontrolü

C Özkan - 2020 - dspace.kocaeli.edu.tr
Simulation programs are developed in Ansys Mechanical APDL platform. With these
programs, it is aimed to develop an experiment environment that will enable creating a …