Demonstration of electrostatic MEMS bifurcation sensors

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A review of actuation and sensing mechanisms in MEMS-based sensor devices

AS Algamili, MHM Khir, JO Dennis, AY Ahmed… - Nanoscale research …, 2021 - Springer
Over the last couple of decades, the advancement in Microelectromechanical System
(MEMS) devices is highly demanded for integrating the economically miniaturized sensors …
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