This article describes the behavior of Cernox™ zirconium oxynitride film temperature
sensors from Lake Shore Cryotronics, Inc. in magnetic fields up to 32 T at temperatures …

Many thermal measurements in high magnetic fields—including heat capacity, thermal
conductivity, thermopower, magnetocaloric, and thermal-Hall-effect measurements—require …

We investigate thin-film resistive thermometry based on metal-to-insulator transition
(niobium nitride) materials down to very low temperature. The variation of the NbN …

ZrO x N y thin films with different thicknesses were deposited on sapphire substrates using
DC magnetron reactive sputtering. The electrodes were then deposited on the surface of the …

Cernox™ resistance thermometers were commercially introduced in 1993. The Cernox™
temperature‐sensing element is fabricated from zirconium reactively sputtered in a nitrogen …

Chromium nitride (CrN) thin films were fabricated onto Si wafers by RF magnetron sputtering
equipment in pure N2 gas. By adjusting the fabrication conditions, the film had negative …

Zirconium oxynitrides thin film thermometers were demonstrated to be useful temperature
sensors. However, the basic conduction mechanism of zirconium oxynitrides films has been …

This paper describes the different cryogenic temperature sensors used at cryogenic
temperatures down to 1 K. The characteristics of these temperature sensors have been …

A ceramic resistor comprising chiefly an aluminum nitride, and an electrostatic chuck using
the ceramic resistor as a resistor layer. The ceramic resistor comprises chiefly an aluminum …

Cryogenic temperature sensing devices fabricated from sputtered zirconium oxynitride thin
films have been commercially available from Lake Shore Cryotronics, Inc. under the …