Nano circuits based on vertical transport

Vibrating mesh atomizer for spin-spray deposition

P Sharma, N Jackson - Journal of Microelectromechanical …, 2021 - ieeexplore.ieee.org
This work presents the development and characterization of a Silicon based MEMS vibrating
mesh atomizer for use in Spin-spray deposition of low viscosity liquids. The device design …
被引用次数：9 相关文章
[PDF] researchgate.net

Spin-spray deposition of spin on glass using MEMS atomizer

P Sharma, N Jackson - 2021 IEEE 34th International …, 2021 - ieeexplore.ieee.org
This work presents a Silicon based MEMS vibrating mesh atomizer for use in Spin-spray
deposition of spin on glass. The device design, fabrication process and application of MEMS …
被引用次数：6 相关文章 所有 2 个版本