For researchers wishing to generate an understanding of complex plasma systems, global
models often present an attractive first step, mainly due to their ease of development and …

Unequal areas of the powered and grounded electrodes in single-frequency capacitively
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …

A fundamental problem in technological plasmas has been how to control the ion energy
and the ion flux (plasma density) independently of one another. A simple, but previously …

Unlike α-and γ-mode operation, electrons accelerated by strong drift and ambipolar electric
fields in the plasma bulk and at the sheath edges are found to dominate the ionization in …

Particle based simulations are indispensable tools for numerical studies of charged particle
swarms and low-temperature plasma sources. The main advantage of such approaches is …

Self-excited plasma series resonances (PSR) are observed in capacitve discharges as high-
frequency oscillations superimposed on the normal rf current. This high-frequency …

Plasma processing is one of the key technologies worldwide, especially using nonthermal,
low-temperature plasmas. Recently, the situation is characterized by the fast-growing …

Plasma-enhanced atomic layer deposition (PEALD) has obtained a prominent position in
the synthesis of nanoscale films with precise growth control. Apart from the well-established …

This paper is the first from a set of two companion papers on radio-frequency (RF)
discharges. These two papers are in turn part of a larger series on the foundations of plasma …

Abstract Analysis of several numerical plasma sheath models, as well as data from several
previously reported experiments, is shown to indicate that the sheath potential function may …