[图书][B] Microlithography: science and technology

BW Smith, K Suzuki - 2018 - taylorfrancis.com
This new edition of the bestselling Microlithography: Science and Technology provides a
balanced treatment of theoretical and operational considerations, from elementary concepts …

The microscope in a computer: image synthesis from three-dimensional full-vector solutions of Maxwell's equations at the nanometer scale

İR Çapoğlu, JD Rogers, A Taflove, V Backman - Progress in Optics, 2012 - Elsevier
We present a comprehensive review and tutorial on emerging numerical electromagnetic
simulations of optical imaging systems based upon three-dimensional full-vector solutions of …

Optimized hardware and software for fast full-chip simulation

Y Cao, YW Lu, L Chen, J Ye - Optical Microlithography XVIII, 2005 - spiedigitallibrary.org
Lithography simulation is an increasingly important part of semiconductor manufacturing
due to the decreasing k1 value. It is not only required in lithography process development …

[图书][B] Electromagnetic simulation and modeling with applications in lithography

TV Pistor - 2001 - search.proquest.com
This thesis is concerned with methods for calculating scattered fields and aerial images in
photolithography. Several improvements to the Finite-Difference Time-Domain code …

Rigorous model-based mask data preparation algorithm applied to grayscale lithography for the patterning at the micrometer scale

P Chevalier, P Quéméré… - Journal of …, 2021 - ieeexplore.ieee.org
Grayscale mask creation has for the most part been restricted to over-simplified optical and
resist models usually based on a contrast curve approach. While this technique has proven …

Geometric aerial image simulation

SV Aleshin, E Egorov, GV Belokopitov… - US Patent …, 2001 - Google Patents
Photolithography is a common technique employed in the manufacture of Semiconductor
devices. Typically, a Semi conductor wafer is coated with a layer (film) of light Sensitive …

Toward a consistent and accurate approach to modeling projection optics

D Peng, P Hu, V Tolani, T Dam… - Optical …, 2010 - spiedigitallibrary.org
This paper presents a consistent and modularized approach to modeling projection optics.
Vector nature of light and polarization effect are considered from the very beginning at …

Extending optical lithography with immersion

B Streefkerk, J Baselmans… - Optical …, 2004 - spiedigitallibrary.org
As the semiconductor industry looks to the future to extend manufacturing beyond 100nm,
ASML have developed a new implementation of an old optical method for lithography …

[图书][B] Optics for photolithography

BW Smith - 1998 - books.google.com
Optical lithography involves the creation of relief image patterns through the projection of
radiation within or near the ultraviolet (UV)-visible portion of the electromagnetic spectrum …

Derivation and simulation of higher numerical aperture scalar aerial images

DC Cole, E Barouch, U Hollerbach… - Japanese journal of …, 1992 - iopscience.iop.org
The application of scalar diffraction theory to a projection optics system is examined here for
somewhat higher numerical aperture conditions upon removing the paraxial, or small angle …