Anchor loss reduction in micro-electro mechanical systems flexural beam resonators using trench hole array reflectors
The quality factor of microelectromechanical resonators is a crucial performance metric and
has thus been the subject of numerous studies aimed at maximizing its value by minimizing …
has thus been the subject of numerous studies aimed at maximizing its value by minimizing …
Study, design, and characterization of anchor loss reduction and tuning the frequency of MEMS resonators for timing applications
M Kazemi - 2023 - espace.etsmtl.ca
Electrically powered devices and machines with electronic components require precise
timing to function properly. The need for accuracy has become increasingly critical with the …
timing to function properly. The need for accuracy has become increasingly critical with the …
Modeling Support Loss in Torsional Mode Vibrations of a Micromechanical Disk Resonator with Two L-Shaped Support Beams
M Bagheri, A Bijari, M Imanparast… - Engineering, Technology & …, 2017 - etasr.com
In this paper, a new micromechanical disc resonator with two L-shaped horizontal support
beams in torsional mode vibrations has been proposed. The proposed micromechanical …
beams in torsional mode vibrations has been proposed. The proposed micromechanical …
[引用][C] طرح جدید تشدیدگر مستطیلی میکرومکانیکی در مد ارتعاشی شناور با ضریب کیفیت بالا و مدهای ناخواسته پایین
بیجاری, راغبی, باقری - فصلنامه صنایع الکترونیک, 2015