Design and fabrication of micro-hotplates made on a polyimide foil: Electrothermal simulation and characterization to achieve power consumption in the low mW range
J Courbat, M Canonica, D Teyssieux… - Journal of …, 2010 - iopscience.iop.org
The design of ultra-low power micro-hotplates on a polyimide (PI) substrate supported by
thermal simulations and characterization is presented. By establishing a method for the …
thermal simulations and characterization is presented. By establishing a method for the …
Smart flow sensor with on-chip CMOS interface performing offset and pressure effect compensation
A single-chip smart flow sensor based on a thermal principle is presented. The device is
fabricated through a commercial complementary metal-oxide-semiconductor (CMOS) …
fabricated through a commercial complementary metal-oxide-semiconductor (CMOS) …
A CMOS compatible micro-Pirani vacuum sensor based on mutual heat transfer with 5-decade operating range and 0.3 Pa detection limit
A Pirani vacuum sensor based on mutual heating between a heater and a distinct
temperature probe, separated by a 5 μm air gap, is proposed. The sensor is fabricated by …
temperature probe, separated by a 5 μm air gap, is proposed. The sensor is fabricated by …
A simple and effective method to compensate the thermal drift of implantable blood pressure sensors
M El Gibari, S Mbacke, C Gauthier, B Lauzier… - Sensors and Actuators A …, 2024 - Elsevier
This article presents a study of implantable blood pressure sensors based on a probe made
up of four piezoresistors. An original method combining both measurements and …
up of four piezoresistors. An original method combining both measurements and …
A high sensitivity and low noise thermal gas flow sensor based on silicon-doped thermocouples
S Hu, J Liu, H Zhang, J Yin, Y Pu, L Tu… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
The detection of gravitational waves in space requires microthrusters that can respond
quickly to compensate for nonconservative forces on the satellite with low thrust noise. Flow …
quickly to compensate for nonconservative forces on the satellite with low thrust noise. Flow …
A temperature compensation algorithm of piezoresistive pressure sensor and software implementation
D Xu, Y Liu - 2013 IEEE International Conference on …, 2013 - ieeexplore.ieee.org
The thermal zero drift and thermal sensitivity drift of piezoresistive pressure sensor plays a
great role in the total error, so how to make this kind of error get effective compensation is …
great role in the total error, so how to make this kind of error get effective compensation is …
A compact CMOS compatible micro-Pirani vacuum sensor with wide operating range and low power consumption
A micro-Pirani vacuum sensor with an operating pressure range of more than 5 decades is
described. The device is fabricated by applying a low-resolution and potentially low-cost …
described. The device is fabricated by applying a low-resolution and potentially low-cost …
Dispositivo para análise e caracterização de materiais semicondutores utilizados como sensores de gás
LT Rossetto - 2021 - lume.ufrgs.br
O trabalho apresentado nessa dissertação consiste fundamentalmente no estudo (projeto),
desenvolvimento e teste de um dispositivo eletrônico destinado à obtenção de parâmetros …
desenvolvimento e teste de um dispositivo eletrônico destinado à obtenção de parâmetros …
Automatic compensation of pressure effects on smart flow sensors in the analog and digital domain
M Piotto, AN Longhitano, F Del Cesta… - Sensors and Actuators A …, 2014 - Elsevier
Two different approaches for the automatic compensation of pressure effects on thermal flow
sensors are investigated. One approach operates in the analog domain and it is based on a …
sensors are investigated. One approach operates in the analog domain and it is based on a …
A novel PWM based readout circuit for pressure sensors
J Long - 2016 3rd International Conference on Information …, 2016 - ieeexplore.ieee.org
In high-performance pressure measurement applications, to reduce the zero drift and
sensitivity drift caused by thermal drift of silicon piezoresistive pressure sensors, temperature …
sensitivity drift caused by thermal drift of silicon piezoresistive pressure sensors, temperature …