The goal of this paper is to overview the historical development of the field of Petri nets
(PNs) from a Systems Theory and Automatic Control perspective. It is intentionally not meant …

Cluster tools are automated robotic manufacturing systems containing multiple computer-
controlled process modules. They have been increasingly used for wafer fabrication. This …

There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap
strategy is applied to dual-arm cluster tools handling wafer revisiting, a three-wafer …

This work studies the scheduling problem of a single-arm multicluster tool with a linear
topology and process-bound bottleneck individual tool. The objective is to find a one-wafer …

In semiconductor manufacturing, there are wafer fabrication processes with wafer revisiting.
Some of them must meet wafer residency time constraints. Taking atomic layer deposition …

A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools
with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi …

In wafer fabrication, a robotic cluster tool is required to be closed down in order for
engineers to perform its on-demand and preventive maintenance and switch between …

Because of wafer residency time constraints for cluster tools, it is very difficult to schedule
them. This paper addresses their scheduling issues and conducts their schedulability and …

In semiconductor manufacturing, finding an efficient way for scheduling a multicluster tool is
critical for productivity improvement and cost reduction. This two-part paper analyzes optimal …

Cluster tools, each of which consists of multiple processing modules, one material handling
robot, and loadlocks, are widely used for wafer fabrication processes, such as lithography …