Many electronic systems depend on microelectromechanical system and
nanoelectromechanical system resonators for frequency control applications such as clock …

Thin-film PMUTs have been important research topics among microultrasound experts, and
a concise review on their research progress is reported herein. Through rigorous surveying …

Transit-time ultrasonic flowmeters (TTUFs) are among the most widely used devices for flow
measurements. However, traditional TTUFs are usually based on a bulk piezoelectric …

This article presents a fully integrated pitch-matched piezoelectric micromachined ultrasonic
transducers (PMUTs)-on-CMOS array with high potential in catheter-based ultrasound …

In this work, a miniaturized, low-cost, low-power and high-sensitivity AlN-based micro-
electro-mechanical system (MEMS) hydrophone is proposed for monitoring water pipeline …

We introduce a novel piezoelectric micromachined ultrasonic transducer (PMUT) with a
mass-loaded suspended (MLSP) design, fabricated using sacrificial technique to advance …

This paper presents a system utilizing scandium-doped aluminum nitride (ScAlN)
piezoelectric micromachined ultrasonic transducers (PMUTs) for simultaneous detection of …

This paper presents a monolithic system-on-chip based on a single piezoelectric
micromachined ultrasonic transducer (PMUT) and its CMOS analog front-end circuitry. This …

We have developed a technique of on-chip multisite acoustofluidic manipulation using
aluminum nitride on silicon (AlN-on-Si) piezoelectric micromachined ultrasonic transducers …

This article presents an ultrasonic gas meter based on a scandium-doped aluminum nitride
(Sc0. 2Al0. 8N) piezoelectric micromachined ultrasonic transducer (PMUT) array, where the …