A 46.6 μg/√ Hz Single-Chip Accelerometer Exploiting a DTC-Assisted Chopper Amplifier

X Li, VPJ Chung, MG Guney… - IEEE Journal of Solid …, 2023 - ieeexplore.ieee.org
This article presents a single-chip accelerometer with the best reported thermal noise and
the lowest bias instability among state-of-the-art accelerometers with high-(1000) sensing …

A Low-Power, Wide-Bandwidth, Three-Axis MEMS Accelerometer ASIC Using Beyond-Resonant-Frequency Sensing

J Lin, L Pham, R Tao, A Gutmann, S Guo… - IEEE Journal of Solid …, 2023 - ieeexplore.ieee.org
This article presents a 16-bit wide-bandwidth (BW) high-performance (HP) three-axis micro-
electromechanical system (MEMS) accelerometer readout application-specific integrated …

Stress-and-temperature-induced drift compensation on a high dynamic range accelerometer array using deep neural networks

VPJ Chung, YC Lin, X Li, MG Guney… - 2021 IEEE 34th …, 2021 - ieeexplore.ieee.org
Acceleration random walk, from its name, is widely modeled as an error from random
processes. Contrarily, we hypothesize that acceleration random walk at the averaging time …

Toward 120 dB CMOS-MEMS Arrayed Accelerometers Measuring Through kg Shock Events

VPJ Chung, X Li, MG Guney… - Journal of …, 2024 - ieeexplore.ieee.org
This paper reports on the development of a monolithic capacitive accelerometer array
system that has a designed full-scale range of, a bandwidth larger than 10, with a minimum …

Readout and compensation circuits for high-performance capacitive CMOS-MEMS accelerometers

X Li - 2021 - search.proquest.com
Accelerometer systems need dedicated interface circuits for reading out and processing the
acceleration signals that are generated by the accelerometer transducer. Therefore, readout …

Patterned ALD sidewall metallization on CMOS MEMS and applications

YC Lin - 2022 - search.proquest.com
In the trend of Internet of Things (IoT), technologies that integrate CMOS (complementary
metal-oxide-semiconductor) electronics with MEMS (microelectromechanical systems) …

[图书][B] A high dynamic range hourglass-beam accelerometer array with temperature-and-stress-induced drift compensation using deep neural networks

VPJ Chung - 2021 - search.proquest.com
An emerging application in" Navigation through High Shock" is driving a need for small-size,
low-weight, and low-power accelerometers that can detect 10 kg amplitudes over 10 kHz …