Many different gas discharges and plasmas exhibit bistable states under a given set of
conditions, and the history-dependent hysteresis that is manifested by intensive quantities of …

Abstract Development of a magnetic nozzle radiofrequency (rf) plasma thruster has been
one of challenging topics in space electric propulsion technologies. The thruster typically …

The principle of inductively coupled plasma (ICP) and perspective of ICP development are
reviewed. Multispiral coil ICP (MSC‐ICP), which has the advantages of low inductance, high …

Inductively coupled radio frequency (RF) ion sources operating at 1 MHz under the condition
of a low gas pressure of 0.3 Pa are the basis of negative hydrogen/deuterium ionbased …

The scaling laws associated with the miniaturization of planar inductively coupled plasmas
(ICPs) are investigated. The applications for miniature ICPs include microelectromechanical …

A global (volume averaged) model is developed for a nitrogen discharge in the steady state
for the pressure range 1–100 mTorr. The electron energy distribution function is allowed to …

Inductively coupled plasma (ICP) etching reactors are rapidly becoming the tool of choice for
low gas pressure, high plasma density etching of semiconductor materials. Due to their …

We report on the effect of Ar addition to an O 2 plasma on photoresist etching in an
inductively coupled, traveling wave driven, large area plasma source (LAPS). We also …

Radio frequency (RF) driven H− ion sources are operated at very high power levels of up
100 kW in order to achieve the desired performance. For the experimental setup, these are …

This paper presents the basic physical and numerical principles of a fluid model of the
negative ions source. The model gives self-consistent two-dimensional description of the …