Relation between reactive surface sites and precursor choice for area-selective atomic layer deposition using small molecule inhibitors
MJM Merkx, A Angelidis, A Mameli, J Li… - The Journal of …, 2022 - ACS Publications
Implementation of vapor/phase dosing of small molecule inhibitors (SMIs) in advanced
atomic layer deposition (ALD) cycles is currently being considered for bottom-up fabrication …
atomic layer deposition (ALD) cycles is currently being considered for bottom-up fabrication …
Reaction Mechanism of Area-Selective Atomic Layer Deposition for Al2O3 Nanopatterns
The reaction mechanism of area-selective atomic layer deposition (AS-ALD) of Al2O3 thin
films using self-assembled monolayers (SAMs) was systematically investigated by …
films using self-assembled monolayers (SAMs) was systematically investigated by …
Atomic layer deposition onto thermoplastic polymeric nanofibrous aerogel templates for tailored surface properties
Poly (vinyl alcohol-co-ethylene)(EVOH) nanofibrous aerogel (NFA) templates were
fabricated through vacuum freeze-drying from EVOH nanofibrous suspensions. Aluminum …
fabricated through vacuum freeze-drying from EVOH nanofibrous suspensions. Aluminum …
Spatial atomic layer deposition of nitrogen-doped alumina thin films for high-performance perovskite solar cell encapsulation
An atmospheric-pressure spatial atomic layer deposition (AP-SALD) system is used to
deposit nitrogen-doped alumina (N-AlO x) thin-film-encapsulation layers. The rapid nature of …
deposit nitrogen-doped alumina (N-AlO x) thin-film-encapsulation layers. The rapid nature of …
Aluminum oxide nanoparticle films deposited from a nonthermal plasma: Synthesis, characterization, and crystallization
Aluminum oxide, both in amorphous and crystalline forms, is a widely used inorganic
ceramic material because of its chemical and structural properties. In this work, we …
ceramic material because of its chemical and structural properties. In this work, we …
Experimental study of the auto-catalytic effect of triethylaluminum and TiCl4 residuals at the onset of non-additive polypropylene degradation and their impact on …
J Hernández-Fernández, J López-Martínez - Journal of Analytical and …, 2021 - Elsevier
In this article, the pyrolysis and thermo-oxidative degradation of five industrial waste
products was carried out in a discontinuous quartz reactor at 550° C under the auto-catalytic …
products was carried out in a discontinuous quartz reactor at 550° C under the auto-catalytic …
Amorphous Alumina Thin Films Deposited on Carbon Microfibers As Interface Layer for Thermal Oxidation Barriers
E Des Ligneris, D Samélor, H Vergnes… - ACS Applied …, 2023 - ACS Publications
Carbon microfibers make a promising candidate as textile reinforcement for high
temperature composites provided that their limitation of thermal oxidation over 670 K in air is …
temperature composites provided that their limitation of thermal oxidation over 670 K in air is …
Theoretical Study of the Mechanism for the Reaction of Trimethylaluminum with Ozone
M Kayanuma, YK Choe, T Hagiwara, N Kameda… - ACS …, 2021 - ACS Publications
The mechanism for the reaction of trimethylaluminum (TMA, Al (CH3) 3) with ozone (O3) was
investigated in detail using density functional theory calculations to understand the atomic …
investigated in detail using density functional theory calculations to understand the atomic …
H2O-based atomic layer deposition mechanism of aluminum oxide using trimethylaluminum
Y Wang, J Guo, C Bai, L Xu, H Xiao, Q Shi, Y Ding, A Li… - Surface Science, 2024 - Elsevier
As a nanofabrication technology, atomic layer deposition (ALD) has been widely used in the
fields of displays, microelectronics, nanotechnology, catalysis, energy and coatings. It …
fields of displays, microelectronics, nanotechnology, catalysis, energy and coatings. It …
Inductively Coupled Nonthermal Plasma Synthesis of Size-Controlled γ-Al2O3 Nanocrystals
Gamma alumina (γ-Al2O3) is widely used as a catalyst and catalytic support due to its high
specific surface area and porosity. However, synthesis of γ-Al2O3 nanocrystals is often a …
specific surface area and porosity. However, synthesis of γ-Al2O3 nanocrystals is often a …