This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This paper reports an acceleration sensing method based on two weakly coupled
resonators (WCRs) using the phenomenon of mode localization. When acceleration acts on …

This paper outlines the design of a novel mode-localized electric current sensor based on a
mechanically sensitive element of weakly coupled resonator systems. With the advantage of …

This paper reports a novel mode-localized resonant accelerometer, which can keep high
sensitivity even over a wide range. To improve the adjustability of sensitivity, a new four …

This paper reports a closed-loop mode-localized accelerometer for the first time. The
accelerometer utilizes weakly coupled single-tine resonators as the sensing element to …

A novel differential configuration of a high-resolution mode-localized resonant SOI-MEMS
accelerometer is presented in this paper. An effective maximum scale factor of 11/g and a …

In recent years, the concept of utilizing the phenomenon of vibration mode-localization as a
paradigm of mechanical sensing has made profound impact in the design and development …

This paper experimentally demonstrates the ambient pressure drift rejection capability in the
full measurement range of the mode-localized sensors. Based on a mode-localized …

In this paper, we present the strongly nonlinear behavior of a 2-degree-of-freedom weakly
coupled microelectromechanical systems (MEMS) resonator system in a mixed nonlinear …

In this letter, we experimentally demonstrate the existence of an optimal operating region in
a resonant microelectromechanical systems sensor utilizing the principle of vibration mode …