[HTML][HTML] Stress in thin films and coatings: Current status, challenges, and prospects
The issue of stress in thin films and functional coatings is a persistent problem in materials
science and technology that has congregated many efforts, both from experimental and …
science and technology that has congregated many efforts, both from experimental and …
The effect of stress on HfO2-based ferroelectric thin films: A review of recent advances
HfO 2-based thin films have raised considerable interest in ferroelectric memory devices due
to their thickness scalability and process compatibility with CMOS. Stress exhibits a …
to their thickness scalability and process compatibility with CMOS. Stress exhibits a …
[图书][B] Thin-film optical filters
HA Macleod, HA Macleod - 2010 - taylorfrancis.com
Written by a world-renowned authority of optical coatings, Thin-Film Optical Filters, Fourth
Edition presents an introduction to thin-film optical filters for both manufacturers and users …
Edition presents an introduction to thin-film optical filters for both manufacturers and users …
Amorphous optical coatings of present gravitational-wave interferometers
M Granata, A Amato, L Balzarini… - … and Quantum Gravity, 2020 - iopscience.iop.org
We report on the results of an extensive campaign of optical and mechanical
characterization of the ion-beam sputtered oxide layers (Ta 2 O 5, TiO 2, Ta 2 O 5–TiO 2, SiO …
characterization of the ion-beam sputtered oxide layers (Ta 2 O 5, TiO 2, Ta 2 O 5–TiO 2, SiO …
Comparison on the structural, mechanical and tribological properties of TiAlN coatings deposited by HiPIMS and Cathodic Arc Evaporation
MR Alhafian, JB Chemin, Y Fleming… - Surface and Coatings …, 2021 - Elsevier
TiAlN single layer coatings deposited by High-Power Impulse Magnetron Sputtering
(HiPIMS) on carbide and Si-wafers substrates were performed. They were characterized in …
(HiPIMS) on carbide and Si-wafers substrates were performed. They were characterized in …
Exploration of co-sputtered Ta2O5–ZrO2 thin films for gravitational-wave detectors
M Abernathy, A Amato, A Ananyeva… - … and Quantum Gravity, 2021 - iopscience.iop.org
We report on the development and extensive characterization of co-sputtered tantala–
zirconia (Ta 2 O 5-ZrO 2) thin films, with the goal to decrease coating Brownian noise in …
zirconia (Ta 2 O 5-ZrO 2) thin films, with the goal to decrease coating Brownian noise in …
Amorphous niobium oxide thin films
Amorphous niobium oxide thin films were deposited by unbalanced reactive magnetron
sputtering under different conditions of pressure (2 to 4Pa) and oxygen percentage (9, 17 …
sputtering under different conditions of pressure (2 to 4Pa) and oxygen percentage (9, 17 …
[HTML][HTML] Low-loss low thermo-optic coefficient Ta2O5 on crystal quartz planar optical waveguides
Optical resonator-based frequency stabilization plays a critical role in ultra-low linewidth
laser emission and precision sensing, atom clocks, and quantum applications. However …
laser emission and precision sensing, atom clocks, and quantum applications. However …
Process stabilization and a significant enhancement of the deposition rate in reactive high-power impulse magnetron sputtering of ZrO2 and Ta2O5 films
J Vlček, J Rezek, J Houška, R Čerstvý… - Surface and Coatings …, 2013 - Elsevier
High-power impulse magnetron sputtering with a pulsed reactive gas (oxygen) flow control
was used for high-rate reactive depositions of densified stoichiometric ZrO 2 and Ta 2 O 5 …
was used for high-rate reactive depositions of densified stoichiometric ZrO 2 and Ta 2 O 5 …
Hysteresis-free deposition of niobium oxide films by HiPIMS using different pulse management strategies
We systematically investigate the reactive behaviour of two types of high-power pulsed
magnetron discharges above a Nb target using either square voltage pulses (denoted as …
magnetron discharges above a Nb target using either square voltage pulses (denoted as …