The piezoresistive effect of SiC for MEMS sensors at high temperatures: A review

HP Phan, DV Dao, K Nakamura… - Journal of …, 2015 - ieeexplore.ieee.org
Silicon carbide (SiC) is one of the most promising materials for applications in harsh
environments thanks to its excellent electrical, mechanical, and chemical properties. The …

Ultrahigh-quality-factor micro-and nanomechanical resonators using dissipation dilution

NJ Engelsen, A Beccari, TJ Kippenberg - Nature Nanotechnology, 2024 - nature.com
Mechanical resonators are widely used in sensors, transducers and optomechanical
systems, where mechanical dissipation sets the ultimate limit to performance. Over the past …

Strained crystalline nanomechanical resonators with quality factors above 10 billion

A Beccari, DA Visani, SA Fedorov, MJ Bereyhi… - Nature Physics, 2022 - nature.com
In strained mechanical resonators, the concurrence of tensile stress and geometric
nonlinearity dramatically reduces dissipation. This phenomenon, called dissipation dilution …

Spiderweb nanomechanical resonators via bayesian optimization: inspired by nature and guided by machine learning

D Shin, A Cupertino, MHJ de Jong… - Advanced …, 2022 - Wiley Online Library
From ultrasensitive detectors of fundamental forces to quantum networks and sensors,
mechanical resonators are enabling next‐generation technologies to operate in room …

Mechanical and electromechanical properties of graphene and their potential application in MEMS

ZH Khan, AR Kermany, A Öchsner… - Journal of Physics D …, 2017 - iopscience.iop.org
Graphene-based micro-electromechanical systems (MEMS) are very promising candidates
for next generation miniaturized, lightweight, and ultra-sensitive devices. In this review, we …

Emerging SiC applications beyond power electronic devices

F La Via, D Alquier, F Giannazzo, T Kimoto, P Neudeck… - Micromachines, 2023 - mdpi.com
In recent years, several new applications of SiC (both 4H and 3C polytypes) have been
proposed in different papers. In this review, several of these emerging applications have …

[HTML][HTML] Integration of graphene and MoS2 on silicon carbide: Materials science challenges and novel devices

F Giannazzo, SE Panasci, E Schilirò, A Koos… - Materials Science in …, 2024 - Elsevier
Although silicon carbide (SiC) is widely regarded as the material of choice for power
electronics, the development of several new applications on the SiC material platform is …

High-q trampoline resonators from strained crystalline ingap for integrated free-space optomechanics

SK Manjeshwar, A Ciers, F Hellman, J Bläsing… - Nano Letters, 2023 - ACS Publications
Nanomechanical resonators realized from tensile-strained materials reach ultralow
mechanical dissipation in the kHz to MHz frequency range. Tensile-strained crystalline …

Nanomechanical dissipation and strain engineering

L Sementilli, E Romero… - Advanced Functional …, 2022 - Wiley Online Library
Nanomechanical resonators have applications in a wide variety of technologies ranging
from biochemical sensors to mobile communications, quantum computing, inertial sensing …

GaAs-based micro/nanomechanical resonators

H Yamaguchi - Semiconductor Science and Technology, 2017 - iopscience.iop.org
Micro/nanomechanical resonators have been extensively studied both for device
applications, such as high-performance sensors and high-frequency devices, and for …