The piezoresistive effect of SiC for MEMS sensors at high temperatures: A review
Silicon carbide (SiC) is one of the most promising materials for applications in harsh
environments thanks to its excellent electrical, mechanical, and chemical properties. The …
environments thanks to its excellent electrical, mechanical, and chemical properties. The …
Ultrahigh-quality-factor micro-and nanomechanical resonators using dissipation dilution
NJ Engelsen, A Beccari, TJ Kippenberg - Nature Nanotechnology, 2024 - nature.com
Mechanical resonators are widely used in sensors, transducers and optomechanical
systems, where mechanical dissipation sets the ultimate limit to performance. Over the past …
systems, where mechanical dissipation sets the ultimate limit to performance. Over the past …
Strained crystalline nanomechanical resonators with quality factors above 10 billion
A Beccari, DA Visani, SA Fedorov, MJ Bereyhi… - Nature Physics, 2022 - nature.com
In strained mechanical resonators, the concurrence of tensile stress and geometric
nonlinearity dramatically reduces dissipation. This phenomenon, called dissipation dilution …
nonlinearity dramatically reduces dissipation. This phenomenon, called dissipation dilution …
Spiderweb nanomechanical resonators via bayesian optimization: inspired by nature and guided by machine learning
D Shin, A Cupertino, MHJ de Jong… - Advanced …, 2022 - Wiley Online Library
From ultrasensitive detectors of fundamental forces to quantum networks and sensors,
mechanical resonators are enabling next‐generation technologies to operate in room …
mechanical resonators are enabling next‐generation technologies to operate in room …
Mechanical and electromechanical properties of graphene and their potential application in MEMS
ZH Khan, AR Kermany, A Öchsner… - Journal of Physics D …, 2017 - iopscience.iop.org
Graphene-based micro-electromechanical systems (MEMS) are very promising candidates
for next generation miniaturized, lightweight, and ultra-sensitive devices. In this review, we …
for next generation miniaturized, lightweight, and ultra-sensitive devices. In this review, we …
Emerging SiC applications beyond power electronic devices
In recent years, several new applications of SiC (both 4H and 3C polytypes) have been
proposed in different papers. In this review, several of these emerging applications have …
proposed in different papers. In this review, several of these emerging applications have …
[HTML][HTML] Integration of graphene and MoS2 on silicon carbide: Materials science challenges and novel devices
Although silicon carbide (SiC) is widely regarded as the material of choice for power
electronics, the development of several new applications on the SiC material platform is …
electronics, the development of several new applications on the SiC material platform is …
High-q trampoline resonators from strained crystalline ingap for integrated free-space optomechanics
SK Manjeshwar, A Ciers, F Hellman, J Bläsing… - Nano Letters, 2023 - ACS Publications
Nanomechanical resonators realized from tensile-strained materials reach ultralow
mechanical dissipation in the kHz to MHz frequency range. Tensile-strained crystalline …
mechanical dissipation in the kHz to MHz frequency range. Tensile-strained crystalline …
Nanomechanical dissipation and strain engineering
L Sementilli, E Romero… - Advanced Functional …, 2022 - Wiley Online Library
Nanomechanical resonators have applications in a wide variety of technologies ranging
from biochemical sensors to mobile communications, quantum computing, inertial sensing …
from biochemical sensors to mobile communications, quantum computing, inertial sensing …
GaAs-based micro/nanomechanical resonators
H Yamaguchi - Semiconductor Science and Technology, 2017 - iopscience.iop.org
Micro/nanomechanical resonators have been extensively studied both for device
applications, such as high-performance sensors and high-frequency devices, and for …
applications, such as high-performance sensors and high-frequency devices, and for …